JPH0351052B2 - - Google Patents
Info
- Publication number
- JPH0351052B2 JPH0351052B2 JP56138843A JP13884381A JPH0351052B2 JP H0351052 B2 JPH0351052 B2 JP H0351052B2 JP 56138843 A JP56138843 A JP 56138843A JP 13884381 A JP13884381 A JP 13884381A JP H0351052 B2 JPH0351052 B2 JP H0351052B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ionization chamber
- primary
- mass spectrometer
- secondary ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 79
- 238000004458 analytical method Methods 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 5
- 239000000523 sample Substances 0.000 description 64
- 239000007789 gas Substances 0.000 description 23
- 238000010884 ion-beam technique Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 9
- 238000001228 spectrum Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 6
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 150000001793 charged compounds Chemical class 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229960001192 bekanamycin Drugs 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 229930182824 kanamycin B Natural products 0.000 description 2
- SKKLOUVUUNMCJE-FQSMHNGLSA-N kanamycin B Chemical compound N[C@@H]1[C@@H](O)[C@H](O)[C@@H](CN)O[C@@H]1O[C@H]1[C@H](O)[C@@H](O[C@@H]2[C@@H]([C@@H](N)[C@H](O)[C@@H](CO)O2)O)[C@H](N)C[C@@H]1N SKKLOUVUUNMCJE-FQSMHNGLSA-N 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 241000021559 Dicerandra Species 0.000 description 1
- 235000010654 Melissa officinalis Nutrition 0.000 description 1
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 150000002314 glycerols Chemical class 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000865 liniment Substances 0.000 description 1
- 238000004811 liquid chromatography Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 208000011117 substance-related disease Diseases 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56138843A JPS5840761A (ja) | 1981-09-02 | 1981-09-02 | 二次イオン質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56138843A JPS5840761A (ja) | 1981-09-02 | 1981-09-02 | 二次イオン質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5840761A JPS5840761A (ja) | 1983-03-09 |
| JPH0351052B2 true JPH0351052B2 (ko) | 1991-08-05 |
Family
ID=15231482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56138843A Granted JPS5840761A (ja) | 1981-09-02 | 1981-09-02 | 二次イオン質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5840761A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5996643A (ja) * | 1982-11-24 | 1984-06-04 | Hitachi Ltd | 質量分析装置 |
| JPH077660B2 (ja) * | 1984-05-16 | 1995-01-30 | 株式会社日立製作所 | 大気圧イオン化質量分析計 |
| JP2675064B2 (ja) * | 1988-05-09 | 1997-11-12 | 日本電子株式会社 | 質量分析装置用イオン源 |
| CN105103265B (zh) * | 2013-12-13 | 2017-05-10 | 中国科学院地质与地球物理研究所 | 使用二次离子质谱仪分析气体样品的系统和方法 |
| JP7073423B2 (ja) * | 2020-01-21 | 2022-05-23 | 日本電子株式会社 | 質量分析装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333689A (en) * | 1976-09-10 | 1978-03-29 | Hitachi Ltd | Composite ion source for mass spectrometer |
-
1981
- 1981-09-02 JP JP56138843A patent/JPS5840761A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333689A (en) * | 1976-09-10 | 1978-03-29 | Hitachi Ltd | Composite ion source for mass spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5840761A (ja) | 1983-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0103586B1 (en) | Sputter initiated resonance ionization spectrometry | |
| US5128543A (en) | Particle analyzer apparatus and method | |
| US3517191A (en) | Scanning ion microscope with magnetic sector lens to purify the primary ion beam | |
| US4058724A (en) | Ion Scattering spectrometer with two analyzers preferably in tandem | |
| US20090121127A1 (en) | System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample | |
| WO2007108211A1 (ja) | ガス分析装置 | |
| US5665967A (en) | Apparatus and method for surface analysis | |
| JP2015514300A5 (ko) | ||
| JP2020507883A (ja) | 無機および有機質量分析法システムおよびその使用方法 | |
| JP2015511704A (ja) | 質量分析計装置のための改良されたインタフェース | |
| JPS5829578B2 (ja) | シツリヨウブンセキソウチト ソノイオンセンベツソウチ | |
| US6614019B2 (en) | Mass spectrometry detector | |
| JPH0218854A (ja) | 液体クロマトグラフ／質量分析装置 | |
| JPH0351052B2 (ko) | ||
| JP2015028921A (ja) | イオン群照射装置、二次イオン質量分析装置、および二次イオン質量分析方法 | |
| JP3018880B2 (ja) | 質量分析装置及び質量分析方法 | |
| JP2015502645A (ja) | 質量分析法における、又は質量分析法に関連する改良 | |
| US2772363A (en) | Method and apparatus for ionization of solids | |
| US4816685A (en) | Ion volume ring | |
| JPS61116742A (ja) | Ｓｎｍｓ法を実施する装置 | |
| JPH0830695B2 (ja) | 液体クロマトグラフ・質量分析装置 | |
| JP2015028919A (ja) | イオン群照射装置、二次イオン質量分析装置、及び二次イオン質量分析方法 | |
| TW202134618A (zh) | 具有離子源的氣體分析器系統 | |
| Gersch et al. | Postionization of sputtered neutrals by a focused electron beam | |
| Miltenberger | Secondary ion emission in MeV-SIMS |