JPH0345539B2 - - Google Patents

Info

Publication number
JPH0345539B2
JPH0345539B2 JP57046271A JP4627182A JPH0345539B2 JP H0345539 B2 JPH0345539 B2 JP H0345539B2 JP 57046271 A JP57046271 A JP 57046271A JP 4627182 A JP4627182 A JP 4627182A JP H0345539 B2 JPH0345539 B2 JP H0345539B2
Authority
JP
Japan
Prior art keywords
tunnel
bonding
wire bonding
reducing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57046271A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58164234A (ja
Inventor
Shinichi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57046271A priority Critical patent/JPS58164234A/ja
Publication of JPS58164234A publication Critical patent/JPS58164234A/ja
Publication of JPH0345539B2 publication Critical patent/JPH0345539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/075—
    • H10W72/0711—
    • H10W90/756—

Landscapes

  • Wire Bonding (AREA)
JP57046271A 1982-03-25 1982-03-25 半導体用ワイヤボンデイング装置 Granted JPS58164234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57046271A JPS58164234A (ja) 1982-03-25 1982-03-25 半導体用ワイヤボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57046271A JPS58164234A (ja) 1982-03-25 1982-03-25 半導体用ワイヤボンデイング装置

Publications (2)

Publication Number Publication Date
JPS58164234A JPS58164234A (ja) 1983-09-29
JPH0345539B2 true JPH0345539B2 (show.php) 1991-07-11

Family

ID=12742558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57046271A Granted JPS58164234A (ja) 1982-03-25 1982-03-25 半導体用ワイヤボンデイング装置

Country Status (1)

Country Link
JP (1) JPS58164234A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014159813A1 (en) 2013-03-13 2014-10-02 Moderna Therapeutics, Inc. Long-lived polynucleotide molecules

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526790B2 (ja) * 1993-06-28 1996-08-21 日本電気株式会社 半導体製造装置
CN103801866B (zh) * 2014-03-06 2015-07-01 成都先进功率半导体股份有限公司 一种焊线机推片下料装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513824A (en) * 1978-07-14 1980-01-31 Hitachi Ltd Passage of gas chromatography
JPS55127025A (en) * 1979-03-26 1980-10-01 Toshiba Corp Assembly for semiconductor device and its apparatus
JPS55138246A (en) * 1979-04-13 1980-10-28 Toshiba Corp Manufacture of semicondoctor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014159813A1 (en) 2013-03-13 2014-10-02 Moderna Therapeutics, Inc. Long-lived polynucleotide molecules

Also Published As

Publication number Publication date
JPS58164234A (ja) 1983-09-29

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