JPH033943B2 - - Google Patents
Info
- Publication number
- JPH033943B2 JPH033943B2 JP59009086A JP908684A JPH033943B2 JP H033943 B2 JPH033943 B2 JP H033943B2 JP 59009086 A JP59009086 A JP 59009086A JP 908684 A JP908684 A JP 908684A JP H033943 B2 JPH033943 B2 JP H033943B2
- Authority
- JP
- Japan
- Prior art keywords
- length
- gate
- mask
- diffusion region
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P74/00—
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59009086A JPS60153137A (ja) | 1984-01-20 | 1984-01-20 | 半導体装置の寸法測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59009086A JPS60153137A (ja) | 1984-01-20 | 1984-01-20 | 半導体装置の寸法測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60153137A JPS60153137A (ja) | 1985-08-12 |
| JPH033943B2 true JPH033943B2 (enExample) | 1991-01-21 |
Family
ID=11710802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59009086A Granted JPS60153137A (ja) | 1984-01-20 | 1984-01-20 | 半導体装置の寸法測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60153137A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100336792B1 (ko) * | 2000-05-25 | 2002-05-16 | 박종섭 | 실리사이드막 제조공정의 평가를 위한 시험 패턴의 구조 |
| KR100819558B1 (ko) | 2006-09-04 | 2008-04-07 | 삼성전자주식회사 | 반도체 저항소자들 및 그의 형성방법들 |
| US8151441B1 (en) * | 2008-03-27 | 2012-04-10 | Western Digital (Fremont), Llc | Method for providing and utilizing an electronic lapping guide in a magnetic recording transducer |
-
1984
- 1984-01-20 JP JP59009086A patent/JPS60153137A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60153137A (ja) | 1985-08-12 |
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