JPH0337730B2 - - Google Patents

Info

Publication number
JPH0337730B2
JPH0337730B2 JP56192293A JP19229381A JPH0337730B2 JP H0337730 B2 JPH0337730 B2 JP H0337730B2 JP 56192293 A JP56192293 A JP 56192293A JP 19229381 A JP19229381 A JP 19229381A JP H0337730 B2 JPH0337730 B2 JP H0337730B2
Authority
JP
Japan
Prior art keywords
substrate
reactor
chamber
holder
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56192293A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5893322A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56192293A priority Critical patent/JPS5893322A/ja
Publication of JPS5893322A publication Critical patent/JPS5893322A/ja
Publication of JPH0337730B2 publication Critical patent/JPH0337730B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Light Receiving Elements (AREA)
JP56192293A 1981-11-30 1981-11-30 半導体装置製造装置 Granted JPS5893322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192293A JPS5893322A (ja) 1981-11-30 1981-11-30 半導体装置製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192293A JPS5893322A (ja) 1981-11-30 1981-11-30 半導体装置製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4103746A Division JPH0831420B2 (ja) 1992-03-30 1992-03-30 被膜作製装置

Publications (2)

Publication Number Publication Date
JPS5893322A JPS5893322A (ja) 1983-06-03
JPH0337730B2 true JPH0337730B2 (enrdf_load_stackoverflow) 1991-06-06

Family

ID=16288860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192293A Granted JPS5893322A (ja) 1981-11-30 1981-11-30 半導体装置製造装置

Country Status (1)

Country Link
JP (1) JPS5893322A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010681A (ja) * 1983-06-30 1985-01-19 Canon Inc 光電変換部材の製造装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945219B2 (ja) * 1976-05-17 1984-11-05 株式会社日立製作所 ウェハ処理装置
JPS54153740A (en) * 1978-05-25 1979-12-04 Ulvac Corp Continuous vacuum treatment apparatus
JPS5578524A (en) * 1978-12-10 1980-06-13 Shunpei Yamazaki Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5893322A (ja) 1983-06-03

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