JPH0336293B2 - - Google Patents

Info

Publication number
JPH0336293B2
JPH0336293B2 JP57172010A JP17201082A JPH0336293B2 JP H0336293 B2 JPH0336293 B2 JP H0336293B2 JP 57172010 A JP57172010 A JP 57172010A JP 17201082 A JP17201082 A JP 17201082A JP H0336293 B2 JPH0336293 B2 JP H0336293B2
Authority
JP
Japan
Prior art keywords
pattern
exposure
exposure pattern
electron beam
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57172010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961131A (ja
Inventor
Yasuhide Machida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57172010A priority Critical patent/JPS5961131A/ja
Publication of JPS5961131A publication Critical patent/JPS5961131A/ja
Publication of JPH0336293B2 publication Critical patent/JPH0336293B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP57172010A 1982-09-30 1982-09-30 電子ビ−ム露光方法 Granted JPS5961131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57172010A JPS5961131A (ja) 1982-09-30 1982-09-30 電子ビ−ム露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57172010A JPS5961131A (ja) 1982-09-30 1982-09-30 電子ビ−ム露光方法

Publications (2)

Publication Number Publication Date
JPS5961131A JPS5961131A (ja) 1984-04-07
JPH0336293B2 true JPH0336293B2 (cs) 1991-05-31

Family

ID=15933847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57172010A Granted JPS5961131A (ja) 1982-09-30 1982-09-30 電子ビ−ム露光方法

Country Status (1)

Country Link
JP (1) JPS5961131A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61183926A (ja) * 1985-02-08 1986-08-16 Toshiba Corp 荷電ビ−ム照射装置
US5393634A (en) * 1993-05-27 1995-02-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Continuous phase and amplitude holographic elements
JP5182641B2 (ja) * 2008-12-01 2013-04-17 凸版印刷株式会社 フォトマスクのパターンデータ生成方法、フォトマスクのパターンデータ生成装置、およびプログラム

Also Published As

Publication number Publication date
JPS5961131A (ja) 1984-04-07

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