JPH0336278A - 霧化薄膜形成装置 - Google Patents

霧化薄膜形成装置

Info

Publication number
JPH0336278A
JPH0336278A JP1170491A JP17049189A JPH0336278A JP H0336278 A JPH0336278 A JP H0336278A JP 1170491 A JP1170491 A JP 1170491A JP 17049189 A JP17049189 A JP 17049189A JP H0336278 A JPH0336278 A JP H0336278A
Authority
JP
Japan
Prior art keywords
film forming
substrate
film
chamber
forming chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1170491A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Mizuho Imai
今井　瑞穂
Hideyo Iida
英世 飯田
Atsuo Ito
厚雄 伊藤
Mikio Sekiguchi
幹夫 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP1170491A priority Critical patent/JPH0336278A/ja
Publication of JPH0336278A publication Critical patent/JPH0336278A/ja
Publication of JPH0461076B2 publication Critical patent/JPH0461076B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1170491A 1989-06-30 1989-06-30 霧化薄膜形成装置 Granted JPH0336278A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1170491A JPH0336278A (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1170491A JPH0336278A (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0336278A true JPH0336278A (ja) 1991-02-15
JPH0461076B2 JPH0461076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-29

Family

ID=15905949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1170491A Granted JPH0336278A (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0336278A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009142187A1 (ja) * 2008-05-22 2009-11-26 株式会社カネカ 薄膜光電変換装置とその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009142187A1 (ja) * 2008-05-22 2009-11-26 株式会社カネカ 薄膜光電変換装置とその製造方法
JP5069791B2 (ja) * 2008-05-22 2012-11-07 株式会社カネカ 薄膜光電変換装置とその製造方法
US8907204B2 (en) 2008-05-22 2014-12-09 Kaneka Corporation Thin film photoelectric conversion device and method for manufacturing the same

Also Published As

Publication number Publication date
JPH0461076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-29

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