JPH0335775B2 - - Google Patents

Info

Publication number
JPH0335775B2
JPH0335775B2 JP12434282A JP12434282A JPH0335775B2 JP H0335775 B2 JPH0335775 B2 JP H0335775B2 JP 12434282 A JP12434282 A JP 12434282A JP 12434282 A JP12434282 A JP 12434282A JP H0335775 B2 JPH0335775 B2 JP H0335775B2
Authority
JP
Japan
Prior art keywords
electron beam
deflection
cathode
electrodes
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12434282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5916255A (ja
Inventor
Akihira Fujinami
Tomoaki Sakai
Mamoru Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57124342A priority Critical patent/JPS5916255A/ja
Publication of JPS5916255A publication Critical patent/JPS5916255A/ja
Publication of JPH0335775B2 publication Critical patent/JPH0335775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
JP57124342A 1982-07-19 1982-07-19 電子銃 Granted JPS5916255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57124342A JPS5916255A (ja) 1982-07-19 1982-07-19 電子銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57124342A JPS5916255A (ja) 1982-07-19 1982-07-19 電子銃

Publications (2)

Publication Number Publication Date
JPS5916255A JPS5916255A (ja) 1984-01-27
JPH0335775B2 true JPH0335775B2 (ru) 1991-05-29

Family

ID=14882979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57124342A Granted JPS5916255A (ja) 1982-07-19 1982-07-19 電子銃

Country Status (1)

Country Link
JP (1) JPS5916255A (ru)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2616918B2 (ja) * 1987-03-26 1997-06-04 キヤノン株式会社 表示装置
JP2654013B2 (ja) * 1987-05-06 1997-09-17 キヤノン株式会社 電子放出素子およびその製造方法
JP2627622B2 (ja) * 1987-08-26 1997-07-09 キヤノン株式会社 電子放出素子
JP2645708B2 (ja) * 1987-08-26 1997-08-25 キヤノン株式会社 電子放出素子
JPH01311929A (ja) * 1988-06-11 1989-12-15 Nitto Denko Corp 車体外装材の固定部材
DE3887891T2 (de) * 1988-11-01 1994-08-11 Ibm Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel.
EP0518633B1 (en) * 1991-06-10 1997-11-12 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
US5384463A (en) * 1991-06-10 1995-01-24 Fujisu Limited Pattern inspection apparatus and electron beam apparatus
US5557105A (en) * 1991-06-10 1996-09-17 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
US5533903A (en) * 1994-06-06 1996-07-09 Kennedy; Stephen E. Method and system for music training
US7838839B2 (en) * 2003-12-30 2010-11-23 Commissariat A L'energie Atomique Hybrid multibeam electronic emission device with controlled divergence
EP1760762B1 (en) * 2005-09-06 2012-02-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Device and method for selecting an emission area of an emission pattern

Also Published As

Publication number Publication date
JPS5916255A (ja) 1984-01-27

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