JPH0334826B2 - - Google Patents

Info

Publication number
JPH0334826B2
JPH0334826B2 JP59103029A JP10302984A JPH0334826B2 JP H0334826 B2 JPH0334826 B2 JP H0334826B2 JP 59103029 A JP59103029 A JP 59103029A JP 10302984 A JP10302984 A JP 10302984A JP H0334826 B2 JPH0334826 B2 JP H0334826B2
Authority
JP
Japan
Prior art keywords
flow rate
semiconductor
semiconductor flow
fluid
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59103029A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60247170A (ja
Inventor
Masayuki Sekimura
Shunji Shiromizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59103029A priority Critical patent/JPS60247170A/ja
Publication of JPS60247170A publication Critical patent/JPS60247170A/ja
Publication of JPH0334826B2 publication Critical patent/JPH0334826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59103029A 1984-05-22 1984-05-22 半導体流速検出器 Granted JPS60247170A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59103029A JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59103029A JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
JPS60247170A JPS60247170A (ja) 1985-12-06
JPH0334826B2 true JPH0334826B2 (enrdf_load_stackoverflow) 1991-05-24

Family

ID=14343219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59103029A Granted JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Country Status (1)

Country Link
JP (1) JPS60247170A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280576A (ja) * 1985-06-05 1986-12-11 Toray Ind Inc フロ−メ−タ
GB9315779D0 (en) * 1993-07-30 1993-09-15 Stoneplan Limited Apparatus and methods
NL1000454C2 (nl) * 1995-05-30 1996-12-03 Mierij Meteo Bv Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Also Published As

Publication number Publication date
JPS60247170A (ja) 1985-12-06

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