JPS60247170A - 半導体流速検出器 - Google Patents

半導体流速検出器

Info

Publication number
JPS60247170A
JPS60247170A JP59103029A JP10302984A JPS60247170A JP S60247170 A JPS60247170 A JP S60247170A JP 59103029 A JP59103029 A JP 59103029A JP 10302984 A JP10302984 A JP 10302984A JP S60247170 A JPS60247170 A JP S60247170A
Authority
JP
Japan
Prior art keywords
flow speed
temp
transistor
semiconductor
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59103029A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334826B2 (enrdf_load_stackoverflow
Inventor
Masayuki Sekimura
関村　雅之
Shunji Shiromizu
白水　俊次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59103029A priority Critical patent/JPS60247170A/ja
Publication of JPS60247170A publication Critical patent/JPS60247170A/ja
Publication of JPH0334826B2 publication Critical patent/JPH0334826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59103029A 1984-05-22 1984-05-22 半導体流速検出器 Granted JPS60247170A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59103029A JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59103029A JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
JPS60247170A true JPS60247170A (ja) 1985-12-06
JPH0334826B2 JPH0334826B2 (enrdf_load_stackoverflow) 1991-05-24

Family

ID=14343219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59103029A Granted JPS60247170A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Country Status (1)

Country Link
JP (1) JPS60247170A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280576A (ja) * 1985-06-05 1986-12-11 Toray Ind Inc フロ−メ−タ
WO1995004338A3 (en) * 1993-07-30 1995-06-08 Airsense Technology Ltd Smoke detection system
NL1000454C2 (nl) * 1995-05-30 1996-12-03 Mierij Meteo Bv Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280576A (ja) * 1985-06-05 1986-12-11 Toray Ind Inc フロ−メ−タ
WO1995004338A3 (en) * 1993-07-30 1995-06-08 Airsense Technology Ltd Smoke detection system
EP0825575A1 (en) * 1993-07-30 1998-02-25 Airsense Technology Limited Smoke detection system
NL1000454C2 (nl) * 1995-05-30 1996-12-03 Mierij Meteo Bv Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.
WO1996038731A1 (en) * 1995-05-30 1996-12-05 Mierij Meteo B.V. Device for determining the direction and speed of an air flow

Also Published As

Publication number Publication date
JPH0334826B2 (enrdf_load_stackoverflow) 1991-05-24

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