JPH0334002B2 - - Google Patents

Info

Publication number
JPH0334002B2
JPH0334002B2 JP56069189A JP6918981A JPH0334002B2 JP H0334002 B2 JPH0334002 B2 JP H0334002B2 JP 56069189 A JP56069189 A JP 56069189A JP 6918981 A JP6918981 A JP 6918981A JP H0334002 B2 JPH0334002 B2 JP H0334002B2
Authority
JP
Japan
Prior art keywords
light
test
tested
measurement device
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56069189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57182604A (en
Inventor
Tetsuo Sueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56069189A priority Critical patent/JPS57182604A/ja
Publication of JPS57182604A publication Critical patent/JPS57182604A/ja
Publication of JPH0334002B2 publication Critical patent/JPH0334002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP56069189A 1981-05-07 1981-05-07 Interference measuring device Granted JPS57182604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56069189A JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56069189A JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Publications (2)

Publication Number Publication Date
JPS57182604A JPS57182604A (en) 1982-11-10
JPH0334002B2 true JPH0334002B2 (en, 2012) 1991-05-21

Family

ID=13395526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56069189A Granted JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Country Status (1)

Country Link
JP (1) JPS57182604A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19602445A1 (de) 1996-01-24 1997-07-31 Nanopro Luftlager Produktions Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
JP4583611B2 (ja) * 2001-01-11 2010-11-17 富士フイルム株式会社 斜入射干渉計装置

Also Published As

Publication number Publication date
JPS57182604A (en) 1982-11-10

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