JPH0333246B2 - - Google Patents
Info
- Publication number
- JPH0333246B2 JPH0333246B2 JP60058323A JP5832385A JPH0333246B2 JP H0333246 B2 JPH0333246 B2 JP H0333246B2 JP 60058323 A JP60058323 A JP 60058323A JP 5832385 A JP5832385 A JP 5832385A JP H0333246 B2 JPH0333246 B2 JP H0333246B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- laser
- sample
- spot
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058323A JPS60227219A (ja) | 1985-03-25 | 1985-03-25 | レーザ加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058323A JPS60227219A (ja) | 1985-03-25 | 1985-03-25 | レーザ加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60227219A JPS60227219A (ja) | 1985-11-12 |
| JPH0333246B2 true JPH0333246B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-16 |
Family
ID=13081074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60058323A Granted JPS60227219A (ja) | 1985-03-25 | 1985-03-25 | レーザ加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60227219A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01248121A (ja) * | 1988-03-30 | 1989-10-03 | Agency Of Ind Science & Technol | 一軸駆動形多自由度リレー光学系 |
| JP2716725B2 (ja) * | 1988-03-30 | 1998-02-18 | 工業技術院長 | 方向および位置可変形リレー光学系 |
| JPH01159989U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-04-21 | 1989-11-07 | ||
| DE102018208752B4 (de) * | 2018-06-04 | 2024-08-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Bearbeitung zur Bearbeitung schwer zugänglicher Werkstücke sowie Verwendung einer Vorrichtung |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5391754A (en) * | 1977-01-21 | 1978-08-11 | Canon Inc | Scannint type photo detector |
-
1985
- 1985-03-25 JP JP60058323A patent/JPS60227219A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60227219A (ja) | 1985-11-12 |