JPH0333066Y2 - - Google Patents
Info
- Publication number
- JPH0333066Y2 JPH0333066Y2 JP20286286U JP20286286U JPH0333066Y2 JP H0333066 Y2 JPH0333066 Y2 JP H0333066Y2 JP 20286286 U JP20286286 U JP 20286286U JP 20286286 U JP20286286 U JP 20286286U JP H0333066 Y2 JPH0333066 Y2 JP H0333066Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- transfer
- sensor
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 127
- 238000001514 detection method Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000010453 quartz Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 230000002265 prevention Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20286286U JPH0333066Y2 (ko) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20286286U JPH0333066Y2 (ko) | 1986-12-24 | 1986-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63105335U JPS63105335U (ko) | 1988-07-08 |
| JPH0333066Y2 true JPH0333066Y2 (ko) | 1991-07-12 |
Family
ID=31167645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20286286U Expired JPH0333066Y2 (ko) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333066Y2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3014433B2 (ja) * | 1990-10-26 | 2000-02-28 | 富士通株式会社 | ウエハの移し換え方法 |
-
1986
- 1986-12-24 JP JP20286286U patent/JPH0333066Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63105335U (ko) | 1988-07-08 |
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