JPH0332780B2 - - Google Patents
Info
- Publication number
- JPH0332780B2 JPH0332780B2 JP58212260A JP21226083A JPH0332780B2 JP H0332780 B2 JPH0332780 B2 JP H0332780B2 JP 58212260 A JP58212260 A JP 58212260A JP 21226083 A JP21226083 A JP 21226083A JP H0332780 B2 JPH0332780 B2 JP H0332780B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- compound
- epoxy
- photosensitive resin
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21226083A JPS60103345A (ja) | 1983-11-10 | 1983-11-10 | 感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21226083A JPS60103345A (ja) | 1983-11-10 | 1983-11-10 | 感光性樹脂組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60103345A JPS60103345A (ja) | 1985-06-07 |
| JPH0332780B2 true JPH0332780B2 (enrdf_load_stackoverflow) | 1991-05-14 |
Family
ID=16619627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21226083A Granted JPS60103345A (ja) | 1983-11-10 | 1983-11-10 | 感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60103345A (enrdf_load_stackoverflow) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS509035A (enrdf_load_stackoverflow) * | 1973-05-31 | 1975-01-30 | ||
| JPS5243092A (en) * | 1975-10-01 | 1977-04-04 | Hitachi Ltd | Nuclear reactor |
| JPS608052B2 (ja) * | 1978-10-07 | 1985-02-28 | ダイキン工業株式会社 | 新規フルオロエラストマ−の共架橋用ブレンド組成物 |
-
1983
- 1983-11-10 JP JP21226083A patent/JPS60103345A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60103345A (ja) | 1985-06-07 |