JPH0332780B2 - - Google Patents
Info
- Publication number
- JPH0332780B2 JPH0332780B2 JP58212260A JP21226083A JPH0332780B2 JP H0332780 B2 JPH0332780 B2 JP H0332780B2 JP 58212260 A JP58212260 A JP 58212260A JP 21226083 A JP21226083 A JP 21226083A JP H0332780 B2 JPH0332780 B2 JP H0332780B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- compound
- epoxy
- photosensitive resin
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000001875 compounds Chemical class 0.000 claims description 40
- -1 acryloyloxy group Chemical group 0.000 claims description 15
- 229920000642 polymer Polymers 0.000 claims description 13
- 125000003700 epoxy group Chemical group 0.000 claims description 11
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 230000000379 polymerizing effect Effects 0.000 claims description 6
- 125000001931 aliphatic group Chemical group 0.000 claims description 4
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 125000005336 allyloxy group Chemical group 0.000 claims description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 20
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 18
- 239000011342 resin composition Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 13
- 239000002904 solvent Substances 0.000 description 11
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000001723 curing Methods 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 6
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 239000011253 protective coating Substances 0.000 description 4
- 229920003319 Araldite® Polymers 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 2
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- DXGLGDHPHMLXJC-UHFFFAOYSA-N oxybenzone Chemical group OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 DXGLGDHPHMLXJC-UHFFFAOYSA-N 0.000 description 2
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- LOZBSNNVCOJWGN-UHFFFAOYSA-N 1-benzylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1CC1=CC=CC=C1 LOZBSNNVCOJWGN-UHFFFAOYSA-N 0.000 description 1
- BGJQNPIOBWKQAW-UHFFFAOYSA-N 1-tert-butylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)(C)C BGJQNPIOBWKQAW-UHFFFAOYSA-N 0.000 description 1
- ZOQVDXYAPXAFRW-UHFFFAOYSA-N 2,5-diethyl-1h-imidazole Chemical compound CCC1=CNC(CC)=N1 ZOQVDXYAPXAFRW-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- XOGPDSATLSAZEK-UHFFFAOYSA-N 2-Aminoanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(N)=CC=C3C(=O)C2=C1 XOGPDSATLSAZEK-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N Tetraethylene glycol, Natural products OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- VNDYJBBGRKZCSX-UHFFFAOYSA-L Zinc bromide Inorganic materials Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- IBVAQQYNSHJXBV-UHFFFAOYSA-N adipic acid dihydrazide Chemical compound NNC(=O)CCCCC(=O)NN IBVAQQYNSHJXBV-UHFFFAOYSA-N 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ZLSMCQSGRWNEGX-UHFFFAOYSA-N bis(4-aminophenyl)methanone Chemical class C1=CC(N)=CC=C1C(=O)C1=CC=C(N)C=C1 ZLSMCQSGRWNEGX-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- JDVIRCVIXCMTPU-UHFFFAOYSA-N ethanamine;trifluoroborane Chemical compound CCN.FB(F)F JDVIRCVIXCMTPU-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- YRZFHTRSHNGOSR-UHFFFAOYSA-N phenylmethanamine;trifluoroborane Chemical compound FB(F)F.NCC1=CC=CC=C1 YRZFHTRSHNGOSR-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 229940102001 zinc bromide Drugs 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Description
【発明の詳細な説明】
(技術分野)
本発明は光重合可能な画像形成用感光性樹脂組
成物に関する。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a photopolymerizable photosensitive resin composition for image formation.
(従来技術)
従来より、高分子材料からなるバインダー、光
重合性モノマー及び光重合増感剤などからなる樹
脂組成物を基板上に塗布あるいは被覆させ、陰画
等を通して紫外線のような活性光線を照射し、光
線の当つた部分を重合あるいは架橋させて溶剤に
対し不溶化させ、光線が当たらない部分を溶出さ
せることにより、上記不溶化された画像を基板上
に現像できることが知られており、印刷版材やプ
リリント配線板の製造に利用されている。(Prior art) Conventionally, a resin composition consisting of a binder made of a polymeric material, a photopolymerizable monomer, a photopolymerizable sensitizer, etc. is applied or coated onto a substrate, and actinic light such as ultraviolet rays is irradiated through a negative image. It is known that the insolubilized image can be developed on a substrate by polymerizing or crosslinking the areas that are exposed to the light beam and making them insolubilized in the solvent, and eluating the areas that are not exposed to the light beams. It is used for manufacturing pre-printed wiring boards.
しかし、上記の組成物では得られる画像被膜は
耐溶剤性、耐薬品性、耐熱性および機械的強度が
不充分であり、保護被膜としての使用範囲は限ら
れている。 However, the image coating obtained with the above composition has insufficient solvent resistance, chemical resistance, heat resistance and mechanical strength, and its use as a protective coating is limited.
例えば、これらの被膜は中性、弱酸性溶液には
耐えるが、強酸性、アルカリ溶液には耐えられ
ず、従つて、エツチング、めつき等の処理液の種
類が制限される。又、トトルエン、トリクレン、
メチルエチルケトン等の有機溶剤には弱く、耐熱
性や機械的強度が不充分なため、永久的な保護被
膜になし得ない。 For example, these films can withstand neutral and weakly acidic solutions, but cannot withstand strongly acidic and alkaline solutions, thus limiting the types of processing solutions for etching, plating, and the like. Also, totoluene, trichlene,
It is weak against organic solvents such as methyl ethyl ketone and has insufficient heat resistance and mechanical strength, so it cannot be used as a permanent protective film.
又、永久的な保護被膜を形成する目的で、エポ
キシ化合物及びその硬化剤を含む系が提案されて
いるが、これらは室温可使時間が短かく、硬化に
高温長時間を要し基板に反りを生じさせたり、金
属腐食を起こしたりする。 In addition, systems containing epoxy compounds and their curing agents have been proposed for the purpose of forming permanent protective films, but these have a short pot life at room temperature, require high temperatures and long periods of time to cure, and may warp the substrate. or cause metal corrosion.
特公昭52−43092号公報、特公昭52−43091号公
報、特公昭56−3539号公報などでは、永久的な保
護被膜を形成する目的で、共重合体バインダーの
中に酸成分を含有させて硬化を促進させようとし
ているが、通常の条件では硬化が不充分であり、
はんだ耐熱性、耐溶剤性、耐アルカリ性に弱く、
更に冷熱繰返し特性も充分とは云えない。 In Japanese Patent Publication No. 52-43092, Japanese Patent Publication No. 52-43091, Japanese Patent Publication No. 56-3539, etc., an acid component is contained in a copolymer binder for the purpose of forming a permanent protective film. We are trying to accelerate curing, but curing is insufficient under normal conditions.
Weak in soldering heat resistance, solvent resistance, and alkali resistance,
Furthermore, the cooling and heating cycling characteristics cannot be said to be sufficient.
(発明の目的)
本発明は上記従来の欠点を解消して、貯蔵安定
性に富み、短時間の加熱で充分硬化させることが
でき、永久的な保護被膜を形成させるに適した感
光性樹脂組成物を提供することを目的とする。(Object of the Invention) The present invention solves the above-mentioned conventional drawbacks, and provides a photosensitive resin composition that has excellent storage stability, can be sufficiently cured with short heating, and is suitable for forming a permanent protective film. The purpose is to provide something.
(発明の要旨)
本発明の要旨は、
(a) 末端エチレン基を実質的に少なくとも2個有
する光重合可能な不飽和化合物、
(b) 光重合増感剤及び
(c) 下記一般式()で表わせる化合物及びエポ
キシ基を含有する重合性化合物を成分として重
合して得られる線状高分子化合物
(R1は水素、メチル、エチル、ハロゲンから選
ばれる基、R2、R3、R4のうち少なくとも1つは
ヒドロキシル基、並びにアルコキシル基、アリル
(allyl)オキシ基、アクリロイルオキシ基及びメ
タクリロイルオキシ基からなる群より選ばれる基
を含有する脂肪族炭化水素基であり、他は脂肪族
炭化水素基又は芳香族炭化水素基)よりなる又は
これらを主成分とすることを特徴とする感光性樹
脂組成物に存する。(Summary of the Invention) The summary of the present invention is as follows: (a) a photopolymerizable unsaturated compound having substantially at least two terminal ethylene groups, (b) a photopolymerizable sensitizer, and (c) the following general formula () A linear polymer compound obtained by polymerizing a compound represented by and a polymerizable compound containing an epoxy group as components. (R 1 is a group selected from hydrogen, methyl, ethyl, and halogen; at least one of R 2 , R 3 , and R 4 is a hydroxyl group, and an alkoxyl group, an allyloxy group, an acryloyloxy group, and a methacryloyloxy group) A photosensitive resin characterized in that it is an aliphatic hydrocarbon group containing a group selected from the group consisting of groups, and the other is an aliphatic hydrocarbon group or an aromatic hydrocarbon group, or has these as its main component. present in the composition.
(発明の構成)
本発明における不飽和化合物(a)は、末端エチレ
ン基を実質的に少なくとも2個有する。実質的に
少なくとも2個有するとは、系内に末端エチレン
基を1個しか持たない化合物、末端エチレン基を
3個以上持つている化合物があつてもよく、全体
として平均的に末端エチレン基を1化合物当り少
なくとも2個有していることを意味する。(Structure of the Invention) The unsaturated compound (a) in the present invention substantially has at least two terminal ethylene groups. Substantially having at least two terminal ethylene groups may include a compound having only one terminal ethylene group, a compound having three or more terminal ethylene groups, and the average number of terminal ethylene groups as a whole. This means that one compound has at least two.
不飽和化合物(a)としては、多価アルコールのア
クリル酸エステルもしくはメタクリル酸エステル
が最適であり、具体的にはトリエチレングリコー
ル、テトラエチレングリコール、エチレングリコ
ール、プロピレングリコール、トリメチロールプ
ロパン、ペンタエリスリトール、ネオペンチルグ
リコール等のアクリル酸もしくはメタクリル酸エ
ステルが挙げられる。この成分の使用量は感光性
樹脂組成物中10〜90重量%が好ましく、より好ま
しくは15〜60重量%である。 As the unsaturated compound (a), acrylic esters or methacrylic esters of polyhydric alcohols are most suitable, and specifically, triethylene glycol, tetraethylene glycol, ethylene glycol, propylene glycol, trimethylolpropane, pentaerythritol, Examples include acrylic acid or methacrylic acid esters such as neopentyl glycol. The amount of this component used is preferably 10 to 90% by weight, more preferably 15 to 60% by weight in the photosensitive resin composition.
本発明における増感剤(b)は、活性光線の照射に
より前記不飽和化合物(a)の重合を開始するもので
あり、場合によつては主たる増感剤と、主たる増
感剤の作用を増大する従たる増感剤を組合わせて
用いることがある。 The sensitizer (b) in the present invention is one that initiates polymerization of the unsaturated compound (a) by irradiation with actinic rays, and in some cases may act as the main sensitizer and the action of the main sensitizer. Combinations of increasing secondary sensitizers may be used.
該増感剤(b)は、従来から用いられる増感剤を使
用しうるが、その中でもフエニルケトン系の増感
剤が好適であり、具体的には、ベンゾフエノン、
p,p−ビス(ジメチルアミノ)ベンゾフエノン
〈以下ミヒラーケトンと称する〉などのp−アミ
ノフエニルケトン、ベンゾイン、ベンゾインメチ
ルエーテル、ベンゾインエチルエーテル、ベンゾ
インブチルエーテル、ベンゾインイソプロピルエ
ーテル、ベンジルアンスラキノン、2−メチルア
ンスラキノン、2−エチルアンスラキノン、2−
t−ブチルアンスラキノン、2−アミノアンスラ
キノン等が挙げられる。 As the sensitizer (b), conventionally used sensitizers can be used, but among them, phenylketone-based sensitizers are preferred, and specifically, benzophenone,
p-aminophenyl ketones such as p,p-bis(dimethylamino)benzophenone (hereinafter referred to as Michler's ketone), benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin butyl ether, benzoin isopropyl ether, benzyl anthraquinone, 2-methyl anthraquinone Quinone, 2-ethyl anthraquinone, 2-
Examples include t-butyl anthraquinone and 2-amino anthraquinone.
上記の増感剤(b)は、同様の作用を行なうもの
で、活性光線の吸収域が異なるものを組合わせ
て、重合開始効率を改善させ、露光時間より短縮
させることができる。特に、ベンゾフエノンとミ
トラーケトンの混合物などが好適である。 The above-mentioned sensitizers (b) have similar effects, and by combining those with different absorption ranges of actinic rays, the polymerization initiation efficiency can be improved and the exposure time can be shortened. Particularly suitable is a mixture of benzophenone and mitler ketone.
上記増減剤(b)の使用量は、感光性樹脂組成物中
0.01〜15重量%が好ましく、より好ましくは0.1
〜10重量%である。 The amount of the increase/decrease agent (b) above is determined in the photosensitive resin composition.
Preferably 0.01-15% by weight, more preferably 0.1
~10% by weight.
本発明における線状高分子化合物(c)は、エポキ
シ基を含有する重合性化合物(c−1)と、一般
式()で表わせる化合物(c−2)を成分とし
て重合して得られるものである。 The linear polymer compound (c) in the present invention is obtained by polymerizing an epoxy group-containing polymerizable compound (c-1) and a compound (c-2) represented by the general formula () as components. It is.
エポキシ基を含有する重合性化合物(c−1)
とは、例えばグリシジルメタクリレート、グリシ
ジルアクリレートや、これらから得られる重合性
オリゴマーが挙げられる。 Polymerizable compound containing epoxy group (c-1)
This includes, for example, glycidyl methacrylate, glycidyl acrylate, and polymerizable oligomers obtained from these.
従来、永久的保護被膜を形成する目的でエポキ
シ化合物を用いた感光性樹脂組成物では、エポキ
シ化合物の潜在硬化剤として三フツ化ホウ素モノ
エチルアミン、三フツ化ホウ素ベンジルアミン錯
体、四フツ化ホウ素酸塩、アジピン酸、ジヒドラ
ジド、リエチルアミノボラン、フエニレンジアミ
ン−臭化亜鉛錯体、ジシアンジアミド等がある
が、室温可使時間が短かく、貯蔵安定性が悪い。 Conventionally, in photosensitive resin compositions using epoxy compounds for the purpose of forming a permanent protective film, boron trifluoride monoethylamine, boron trifluoride benzylamine complex, boron tetrafluoride acid are used as latent curing agents for the epoxy compound. There are salts, adipic acid, dihydrazide, ethyl aminoborane, phenylenediamine-zinc bromide complex, dicyandiamide, etc., but they have short pot life at room temperature and poor storage stability.
室温可使時間の長い潜在硬化剤として、p,
p′−ジアミノジフエニルメタン、P,P′−ジアミ
ノジフエニルスルホン酸、2−エチル−4−エチ
ルイミダーゾール等も見い出されているが、硬化
に高温、長時間を要するため、プリント配線板の
製造に使用すると基板に反りを生じたり、加工時
間が長びいて好ましくない。 As a latent curing agent with a long pot life at room temperature, p,
p'-diaminodiphenylmethane, P,P'-diaminodiphenyl sulfonic acid, 2-ethyl-4-ethylimidazole, etc. have also been found, but because they require high temperatures and long periods of time to cure, they cannot be used for printed wiring boards. When used in manufacturing, the substrate may warp or the processing time may become longer, which is undesirable.
又、上記の従来の潜在硬化剤では、金属表面の
基板に拡散していき、精密電気回路の電気的性質
に悪影響を及ぼすことがあり、プリント配線板の
製造には向いてなかつた。 Further, the conventional latent curing agent described above is not suitable for manufacturing printed wiring boards because it may diffuse into the metal surface of the substrate and adversely affect the electrical properties of precision electrical circuits.
そこで、本発明者が鋭意研究の結果、上記の技
術的課題を解決する目的で、上に説明したエポキ
シ基を含有する重合性化合物(c−1)と、下記
一般式()で表わせる化合物(c−2)とを重
合して得られる、線状高分子化合物(c)が見い出さ
れたのである。 Therefore, as a result of intensive research, the present inventor has developed a polymerizable compound (c-1) containing an epoxy group as described above and a compound represented by the following general formula () for the purpose of solving the above technical problem. A linear polymer compound (c) obtained by polymerizing (c-2) with (c-2) was discovered.
化合物(c−2)は、下記一般式()で表わさ
れるアミンイミド化合物である。Compound (c-2) is an amine imide compound represented by the following general formula ().
(R1は水素、メチル、エチル、ハロゲンから
選ばれる基、R2、R3、R4のうち少なくとも1つ
はヒドロキシル基並びに、アルコキシル基、アリ
ル(allyl)オキシ基、アクリロイルオキシ基及
びメタクリロイルオキシ基からなる群より選ばれ
る基を含有する脂肪族炭化水素基であり、他は脂
肪族炭化水素基又は芳香族炭化水素基)
該化合物(c−2)において、R2、R3、R4の脂
肪族炭化水素の炭素数は、炭素数が少なくなると
硬化性、耐熱性等が優れるので、6以下が好まし
く、炭素−炭素二重結合を含んでもよい。 (R 1 is a group selected from hydrogen, methyl, ethyl, and halogen, and at least one of R 2 , R 3 , and R 4 is a hydroxyl group, an alkoxyl group, an allyloxy group, an acryloyloxy group, and a methacryloyloxy group. In the compound (c-2), R 2 , R 3 , R 4 The number of carbon atoms in the aliphatic hydrocarbon is preferably 6 or less, and may contain a carbon-carbon double bond, since the smaller the number of carbon atoms, the better the curability, heat resistance, etc. are.
上記化合物(c−2)を一成分とする線状高分
子化合物cを含有する感光層を硬化して得られる
保護被膜は、構成材料のブリードアウトがないた
め基板表面に悪影響を与えない。しかも上記保護
被膜は、耐熱性、耐溶剤性、耐酸性、耐アルカリ
性等が優れる。この理由は、感光層を硬化したと
き、線状高分子c中のエポキシ部分が架橋すると
ともに、線状高分子化合物cの側鎖に含まれるア
ミンイミド部分から生じるイソシアネートが架橋
点となつて、線状高分子化合物c中で高度に架橋
が進むためと思われる。 The protective film obtained by curing the photosensitive layer containing the linear polymer compound c containing the above-mentioned compound (c-2) as one component does not have an adverse effect on the substrate surface because the constituent materials do not bleed out. Moreover, the above-mentioned protective coating has excellent heat resistance, solvent resistance, acid resistance, alkali resistance, and the like. The reason for this is that when the photosensitive layer is cured, the epoxy moiety in the linear polymer c crosslinks, and the isocyanate generated from the amine imide moiety contained in the side chain of the linear polymer c becomes a crosslinking point. This seems to be because crosslinking progresses to a high degree in the shaped polymer compound c.
一般式()で表わされる化合物(c−2)と
しては、1,1−ジメチル−1−(2−ヒドロキ
シ−3−ブトキシプロピル)アミン−メタクリル
イミド、1,1−ジメチル−1−(2−ヒドロキ
シ−3−アリルオキサシプロピル)アミン−メタ
クリルイミド、1,1−ジメチル−1−(2−ヒ
ドロキシ−3−アクリロイルオキシプロピル)ア
ミン−メタクリルイミド、1,1−ジメチル−1
−(2−ヒドロキシ−3−メタクリロイルオキシ
プロピル)アミン−メタクリルイミド、等が挙げ
られる。 The compound (c-2) represented by the general formula () includes 1,1-dimethyl-1-(2-hydroxy-3-butoxypropyl)amine-methacrylimide, 1,1-dimethyl-1-(2- Hydroxy-3-allyloxacypropyl)amine-methacrylimide, 1,1-dimethyl-1-(2-hydroxy-3-acryloyloxypropyl)amine-methacrylimide, 1,1-dimethyl-1
-(2-hydroxy-3-methacryloyloxypropyl)amine-methacrylimide, and the like.
線状高分子化合物(c)は上記エポキシ基を含有す
る重合性化合物(c−1)と一般式()で表わ
せる化合物(c−2)を成分として重合して得ら
れるものであり、各成分の比率はエポキシ基を含
有する重合性化合物(c−1)は70重量%以下が
好ましく、一般式()で表わせる化合物(c−
2)は15重量%以下が好ましく、残りの部分はメ
チルメタクリレート、メチルアクリレート、ブチ
ルメタクリレート、ブチルアクリレート、スチレ
ン等の上記以外の重合性化合物が共重合されるの
が好ましい。又線状高分子化合物(c)の分子量は10
〜30万が好ましい。 The linear polymer compound (c) is obtained by polymerizing the above-mentioned epoxy group-containing polymerizable compound (c-1) and the compound (c-2) represented by the general formula (). The ratio of the components is preferably 70% by weight or less for the polymerizable compound (c-1) containing an epoxy group;
2) is preferably 15% by weight or less, and the remaining portion is preferably copolymerized with a polymerizable compound other than the above, such as methyl methacrylate, methyl acrylate, butyl methacrylate, butyl acrylate, or styrene. Also, the molecular weight of linear polymer compound (c) is 10
~300,000 is preferable.
線状高分子化合物(c)の使用量は、感光性樹脂組
成物中10〜90重量%が好ましく、より好ましくは
30〜60重量%である。 The amount of linear polymer compound (c) used is preferably 10 to 90% by weight, more preferably 10 to 90% by weight in the photosensitive resin composition.
It is 30-60% by weight.
本発明の感光性樹脂組成物は、上記不飽和化合
物(a)、光重合増減剤(b)及び線状高分子化合物(c)よ
りなるか又はこれらを主成分とするものであり、
さらに従来の感光性樹脂組成物で用いられるエポ
キシ樹脂やエポキシ基を持つオリゴマーを併用し
てもよい。これらの添加成分の種類及び量によ
り、本組成物の柔軟性を適度に制御でき、基板へ
の常圧又は真空ラミネート性が改善され、凹凸表
面を有する基板にも形成される永久的な保護被膜
がよく密着し、精密回路などの埋め込み性が良く
なる。又、基板をはんだ浴に漬けた場合にも、気
泡の発生による浮き、剥離がなくなる。更に、エ
ポキシ樹脂、エポキシ基を持つオリゴマーの種
類、量により、硬化した保護被膜の柔軟性を制御
でき、冷熱繰返し特性が著しく向上する。 The photosensitive resin composition of the present invention consists of the above-mentioned unsaturated compound (a), photopolymerization increaser/decrease agent (b) and linear polymer compound (c), or is composed mainly of these,
Furthermore, epoxy resins and oligomers having epoxy groups used in conventional photosensitive resin compositions may be used in combination. Depending on the type and amount of these additive components, the flexibility of the composition can be controlled to an appropriate degree, improving the normal pressure or vacuum lamination properties on substrates, and creating a permanent protective film that can be formed even on substrates with uneven surfaces. It adheres well, making it easier to embed precision circuits, etc. Furthermore, even when the board is immersed in a solder bath, floating and peeling due to the generation of air bubbles are eliminated. Furthermore, the flexibility of the cured protective film can be controlled by controlling the type and amount of the epoxy resin and oligomer having an epoxy group, and the thermal cycling properties are significantly improved.
上記エポキシ樹脂やエポキシ基を持つオリゴマ
ーとしては具体的にはエポキシ樹脂プレポリマー
であるエピコート828、エピコート1001、エピコ
ート1004、エピコート1007(いずれも商品名、シ
エル社製)、アラルダイトECN−1280、アラルダ
イトECN−1237(いずれも商品名、チバガイギー
社製)等が挙げられる。これらのエポキシ樹脂プ
レポリマー等の使用量は感光性樹脂組成物の5〜
80重量%が好ましく、より好ましくは5〜50重%
の範囲である。 Specifically, the epoxy resins and oligomers having epoxy groups include epoxy resin prepolymers Epicote 828, Epicote 1001, Epicote 1004, Epicote 1007 (all trade names, manufactured by Ciel), Araldite ECN-1280, Araldite ECN -1237 (all product names, manufactured by Ciba Geigy), etc. The amount of these epoxy resin prepolymers used is 5 to 50% of the photosensitive resin composition.
80% by weight is preferred, more preferably 5-50% by weight
is within the range of
本発明の感光性樹脂組成物は以上の必須成分あ
るいは選択成分に加えて、種々の目的のために更
に副次的な成分を含有せしめることが可能であ
る。即ち貯蔵安定性改善のための熱重合禁止剤、
被膜特性改善のための可塑剤、密着改良剤、染
料、顔料、その他の充填剤等である。 In addition to the above-mentioned essential components or optional components, the photosensitive resin composition of the present invention can further contain secondary components for various purposes. That is, a thermal polymerization inhibitor for improving storage stability,
These include plasticizers, adhesion improvers, dyes, pigments, and other fillers to improve film properties.
(発明の作用)
本発明の感光性樹脂組成物は、通常の感光性樹
脂と同様に感光性を有し、活性光線の照射により
光重合を起こし、又、80℃以下では熱的に充分安
定であり、常法により永久的な保護被膜を形成し
うる。(Action of the invention) The photosensitive resin composition of the present invention has photosensitivity similar to ordinary photosensitive resins, undergoes photopolymerization upon irradiation with actinic rays, and is sufficiently thermally stable at temperatures below 80°C. A permanent protective coating can be formed by conventional methods.
即ち、本発明の感光性樹脂組成物を通常は3〜
60重量%の濃度になるように、メチルエチルケト
ン、トルエン、メチルセロソルブ、クロロホルム
等の有機溶剤に溶解させて、液を調製し、下記(1)
あるいは(2)の方法で保護すべき基板上に感光層を
形成させる。 That is, the photosensitive resin composition of the present invention is usually
Prepare a solution by dissolving it in an organic solvent such as methyl ethyl ketone, toluene, methyl cellosolve, or chloroform to a concentration of 60% by weight, and follow the steps below (1).
Alternatively, a photosensitive layer is formed on the substrate to be protected by method (2).
(1) 感光性樹脂組成物を溶解した液を基板上に塗
布し乾燥する。(1) A solution containing a photosensitive resin composition is applied onto a substrate and dried.
(2) 感光性樹脂組成物を溶解した液をポリエチレ
ンテレフタレート等のフイルムに塗布し乾燥す
る。得られたフイルムを熱ロールを用いて基板
に貼合わせる。この場合、フイルムの感光層に
保護フイルムを重ねて保存することもある。(2) A solution containing the photosensitive resin composition is applied to a film such as polyethylene terephthalate and dried. The obtained film is attached to a substrate using a hot roll. In this case, a protective film may be placed over the photosensitive layer of the film for storage.
感光層を形成した基板に対し、ネガマスクを通
して紫外線などの活性光線を照射し、露光部を光
重合、架橋により硬化させる。次いで、1,1,
1−トリクロルエタン等を用いて、未露光部を溶
出して現像を行なう。こうして、得られた像的な
保護被膜は通常のエツチング、めつき等の表面変
性加工のための耐食膜となるが、更に、150℃程
度で数分〜1時間の短時間の加熱硬化により、耐
熱性及び機械的強度に優れた永久的保護被膜とな
る。本発明においては、一般式()で表わせる
化合物(c−2)の働きにより、線状高分子化合
物(c)のエポキシ基あるいは選択的に加えられたエ
ポキシ樹脂プレポリマーが、おだやかな加熱条件
で速やかに硬化し、しかも加熱に至る迄の可使時
間が充分長いところに一つの特徴がある。保護被
膜はトルエン,キシレン等の芳香族炭化水素溶
剤、メチルエチルケトン、アセトン等のケトン溶
剤、二塩化メチレン、クロロホルム、トリクレン
等のハロゲン化炭化水素溶剤などの溶剤に侵され
ず、又、強酸、アルカリ水溶液にも充分耐える。
従つて、はんだ耐熱性に優れたソルダーレジスト
等の永久的な保護被膜として使用し得る。尚、加
熱硬化に先立つて、紫外線などを1〜3J/cm3の強
さで後露光することにより、優れた強度を有する
保護被膜を形成することもできる。更に、本発明
感光性樹脂組成物は、感光性、化学的物理的強度
優れているから、感光性接着剤、感光性塗料、プ
ラスチツクレリーフ、印刷版材料としても用い得
る。 The substrate on which the photosensitive layer is formed is irradiated with actinic light such as ultraviolet rays through a negative mask, and the exposed areas are cured by photopolymerization and crosslinking. Then 1, 1,
Using 1-trichloroethane or the like, the unexposed areas are eluted and developed. The image-like protective film obtained in this way becomes a corrosion-resistant film for ordinary surface modification processing such as etching and plating, but is further cured by heating at about 150°C for a few minutes to an hour. It forms a permanent protective film with excellent heat resistance and mechanical strength. In the present invention, due to the action of the compound (c-2) represented by the general formula (), the epoxy group of the linear polymer compound (c) or the selectively added epoxy resin prepolymer is heated under mild heating conditions. One of its characteristics is that it hardens quickly and has a sufficiently long pot life before heating. The protective coating is not attacked by solvents such as aromatic hydrocarbon solvents such as toluene and xylene, ketone solvents such as methyl ethyl ketone and acetone, and halogenated hydrocarbon solvents such as methylene dichloride, chloroform and trichlene, and is also resistant to strong acids and alkaline aqueous solutions. It also withstands well.
Therefore, it can be used as a permanent protective film such as a solder resist with excellent soldering heat resistance. A protective film having excellent strength can also be formed by post-exposure to ultraviolet light or the like at an intensity of 1 to 3 J/cm 3 prior to heat curing. Further, since the photosensitive resin composition of the present invention has excellent photosensitivity and chemical and physical strength, it can also be used as a photosensitive adhesive, a photosensitive paint, a plastic relief, and a printing plate material.
(実施例)
以下に、本発明の実施例を説明する。尚、「部」
とは「重量部」を意味する。(Example) Examples of the present invention will be described below. In addition, “department”
means "parts by weight".
〈実施例 1〉
メチルメタクリレート/グリシジルメタクリレ
ート/1,1−ジメチル−1−(2−ヒドロキ
シ−3−ブトキシプロピル)アミン−メタクリ
ルイミド共重合体(重量比60/35/5)(Mw=24
万) 60部
ペンタエリスリトールトリアクリレート 30部
ベンゾフエノン 3部
ミヒラーケトン 0.5部
p−メトキシフエノール 0.5部
メチルエチルケケトン 200部
上記配合で得た感光性樹脂組成物を25μmの厚
みのポリエチレンテレフタレート上に塗布乾燥
し、50μmの厚みの感光層を形成した。清浄処理
した銅板上に熱ロールを用いて加圧積層した。そ
してネガマスクを通して高圧水銀灯から100mJ/
cm2の紫外線を照射した。ポリエチレンテレフタレ
ートフイルムを剥離し、1,1,1−トリクロロ
エタンを90秒間スプレーして未露光部を溶出し現
像を行なつた。次いで、150℃で10分加熱処理を
行なつたところ、ネガマスクに相応する精密な像
を有する保護被膜が得られた。この保護被膜はメ
チルエチルケトン、アセトン、クロロホルム、ト
リクレン、メタノール、10%硫酸水溶液、トルエ
ン、キシレンにそれぞれ1日間浸漬しても何の変
化もなく、更に、70℃でPH12の水酸化ナトリウム
水溶液に1日間浸漬しても、何ら異常が認められ
なかつた。<Example 1> Methyl methacrylate/glycidyl methacrylate/1,1-dimethyl-1-(2-hydroxy-3-butoxypropyl)amine-methacrylimide copolymer (weight ratio 60/35/5) (Mw=24
60 parts pentaerythritol triacrylate 30 parts benzophenone 3 parts Michler's ketone 0.5 parts p-methoxyphenol 0.5 parts methyl ethyl ketone 200 parts The photosensitive resin composition obtained with the above formulation was applied and dried on a 25 μm thick polyethylene terephthalate. , a photosensitive layer with a thickness of 50 μm was formed. It was laminated under pressure on a cleaned copper plate using a hot roll. Then, 100mJ/
cm 2 of ultraviolet light was irradiated. The polyethylene terephthalate film was peeled off, and 1,1,1-trichloroethane was sprayed for 90 seconds to elute the unexposed areas and development was performed. Next, heat treatment was performed at 150° C. for 10 minutes, and a protective film with a precise image corresponding to a negative mask was obtained. This protective film showed no change even when immersed in methyl ethyl ketone, acetone, chloroform, trichlene, methanol, 10% sulfuric acid aqueous solution, toluene, and xylene for 1 day, and was further immersed in sodium hydroxide solution with pH 12 at 70°C for 1 day. Even after immersion, no abnormality was observed.
又、60分間隔で−65℃と125℃の冷却加熱を100
回繰返しても、260〜270℃のはんだ浴に2分間浸
漬しても変化がなかつた。更に、この基板は70℃
で1ケ月放置しても表面にブリードアウトは見ら
れず、金属の腐食もなかつた。尚、ポリエチレン
テレフタレートフイルム上に形成した感光層は40
℃で6ケ月保存しても使用に差支えなかつた。以
上のことから、得られた保護被膜は、エツチン
グ、めつき、強アルカリ性無電解めつき用レジス
トとしても、はんだ耐熱性が要求されるソルダー
レジストとしても充分に使用できることが分かつ
た。 Also, heat and cool to -65℃ and 125℃ for 100 minutes at intervals of 60 minutes.
Even after repeating the test several times and immersing it in a solder bath at 260 to 270°C for 2 minutes, there was no change. Furthermore, this board is 70℃
Even after leaving it for a month, no bleed-out was observed on the surface, and there was no corrosion of the metal. The photosensitive layer formed on the polyethylene terephthalate film was 40
There was no problem in using it even if it was stored at ℃ for 6 months. From the above, it was found that the obtained protective film can be satisfactorily used as a resist for etching, plating, strong alkaline electroless plating, and as a solder resist that requires soldering heat resistance.
〈実施例 2〉
実施例1における共重合体の代りに、ブチルメ
タクリルレート/グリシジルメタクリレート/
1,1−ジメチル−1−(2−ヒドロキシ−3−
アクリロイルオキシプロピル)アミン−メタクリ
ルイミド共重合体(重量比40/50/10)(Mw=19
万)を用いた以外は全て実施例1と同じようにし
て感光層を調製した。<Example 2> Instead of the copolymer in Example 1, butyl methacrylate/glycidyl methacrylate/
1,1-dimethyl-1-(2-hydroxy-3-
Acryloyloxypropyl)amine-methacrylimide copolymer (weight ratio 40/50/10) (Mw=19
A photosensitive layer was prepared in the same manner as in Example 1 except that 1,000 yen) was used.
得られた保護被膜は、50%硫酸水溶液に耐え、
耐溶剤性は実施例1と同等であり、冷熱繰返しテ
スト150回、及び270〜280℃のはんだ浴に2分間
耐えることができた。更に、この基板は70℃で2
ケ月放置しても表面ブリードアウトは見られず、
感光層の40℃保存性も実施例1と同等であり、ソ
ルダーレジストや各種レジストとして使用できる
ことが確認された。 The resulting protective film can withstand 50% sulfuric acid aqueous solution,
The solvent resistance was the same as in Example 1, and it was able to withstand 150 repeated heating and cooling tests and a solder bath at 270 to 280°C for 2 minutes. Furthermore, this board has a temperature of 2 at 70°C.
No surface bleed-out was observed even after being left for several months.
The 40°C storage stability of the photosensitive layer was also the same as in Example 1, and it was confirmed that it could be used as a solder resist or various resists.
〈実施例 3〉
実施例2の組成物に、更にエポキシ樹脂プレポ
リマー(チバガイギー社、アラルダイトECN−
1280)を20部加え、同様に感光層を調製した。<Example 3> To the composition of Example 2, an epoxy resin prepolymer (Ciba Geigy, Araldite ECN-
1280) was added to prepare a photosensitive layer in the same manner.
感光層の40℃保存性は6ケ月以上と良好であ
り、形成された保護被膜の耐溶剤性、耐熱性は実
施例2と同等であり、150回の冷熱繰返しにも耐
えることが確認された。又、基板へのラミネート
は常圧、100℃でも細部迄充分に埋め込みされて
おり、この面での改善もあつた。 It was confirmed that the photosensitive layer had good storage stability at 40°C for more than 6 months, and the solvent resistance and heat resistance of the formed protective film were the same as in Example 2, and could withstand 150 cycles of cooling and heating. . In addition, the laminate on the substrate was sufficiently embedded in even the smallest details even at normal pressure and 100°C, and there was an improvement in this aspect.
〈比較例〉
メチルアクリレート/グリシジルメタクリレー
ト共重合体(重量比60/40)(Mw=20万) 60部
ペンタエリスリトールトリアクリレート 30部
ベンゾフエノン 3部
ミヒラーケトン 0.5部
p−メトキシフエノール 0.5部
メチルエチルケトン 200部
及び、エポキシ硬化剤としてジシアンジアミド
2部を添加し、実施例1と同様のテストを行つ
た。感光性の40℃保存性は1週間で硬化が始まり
可使時間が短かいことが判明した。<Comparative example> Methyl acrylate/glycidyl methacrylate copolymer (weight ratio 60/40) (Mw = 200,000) 60 parts pentaerythritol triacrylate 30 parts benzophenone 3 parts Michler ketone 0.5 parts p-methoxyphenol 0.5 parts methyl ethyl ketone 200 parts and, A test similar to that of Example 1 was conducted with the addition of 2 parts of dicyandiamide as an epoxy hardener. It was found that the photosensitive material had a short shelf life at 40°C as it began to harden in one week.
又、露光、現像した後、150℃、10分の加熱で
は、充分な保護被膜が得られず、耐溶剤性、耐熱
性とも実施例1〜3のテストに耐えられなかつ
た。 Further, after exposure and development, heating at 150° C. for 10 minutes did not provide a sufficient protective film, and neither the solvent resistance nor the heat resistance could withstand the tests of Examples 1 to 3.
次いで、150℃、2時間加熱したものは各種有
機溶剤に数10分の耐性があつたが、冷熱繰返しテ
ストでは5サイクル以内にクラツクを生じた。 The material that was then heated at 150°C for 2 hours was resistant to various organic solvents for several tens of minutes, but cracked within 5 cycles in a cold/hot cycle test.
(発明の効果)
以上の様に、本発明感光性樹脂組成物は、貯蔵
安定性に優れ、硬化の際は比較的低温で短時間に
充分に反応が進行し、しかも耐溶剤性、耐アルカ
リ性、耐熱性が良好な保護被膜を形成しうる。(Effects of the Invention) As described above, the photosensitive resin composition of the present invention has excellent storage stability, the reaction progresses sufficiently in a short time at a relatively low temperature during curing, and it has excellent solvent resistance and alkali resistance. , a protective film with good heat resistance can be formed.
Claims (1)
個有する光重合可能な不飽和化合物、 (b) 光重合増感剤並びに (c) 下記の一般式()で表わせる化合物及びエ
ポキシ基を含有する重合性化合物を成分として
重合して得られる線状高分子化合物 (R1は水素、メチル、エチル、ハロゲンから
選ばれる基、R2,R3、R4のうち少なくとも1つ
はヒドロキシル基並びに、アルコキシル基、アリ
ル(allyl)オキシ基、アクリロイルオキシ基及
びメタクリロイルオキシ基からなる群より選ばれ
る基を含有する脂肪族炭化水素基であり、他は脂
肪族炭化水素基又は芳香族炭化水素基) よりなる又はこれらを主成分とすることを特徴と
する感光性樹脂組成物。[Scope of Claims] 1 (a) Substantially at least 2 terminal ethylene groups
(b) a photopolymerizable sensitizer; and (c) a line obtained by polymerizing a compound represented by the following general formula () and a polymerizable compound containing an epoxy group as components; shaped polymer compound (R 1 is a group selected from hydrogen, methyl, ethyl, and halogen, and at least one of R 2 , R 3 , and R 4 is a hydroxyl group, an alkoxyl group, an allyloxy group, an acryloyloxy group, and a methacryloyloxy group. A photosensitive resin characterized in that it is an aliphatic hydrocarbon group containing a group selected from the group consisting of groups, and the others are aliphatic hydrocarbon groups or aromatic hydrocarbon groups. Composition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21226083A JPS60103345A (en) | 1983-11-10 | 1983-11-10 | Photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21226083A JPS60103345A (en) | 1983-11-10 | 1983-11-10 | Photosensitive resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60103345A JPS60103345A (en) | 1985-06-07 |
JPH0332780B2 true JPH0332780B2 (en) | 1991-05-14 |
Family
ID=16619627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21226083A Granted JPS60103345A (en) | 1983-11-10 | 1983-11-10 | Photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60103345A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509035A (en) * | 1973-05-31 | 1975-01-30 | ||
JPS5243092A (en) * | 1975-10-01 | 1977-04-04 | Hitachi Ltd | Nuclear reactor |
JPS5550050A (en) * | 1978-10-07 | 1980-04-11 | Daikin Ind Ltd | Blend composition for coclosslinking of new fluoroelastomer |
-
1983
- 1983-11-10 JP JP21226083A patent/JPS60103345A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509035A (en) * | 1973-05-31 | 1975-01-30 | ||
JPS5243092A (en) * | 1975-10-01 | 1977-04-04 | Hitachi Ltd | Nuclear reactor |
JPS5550050A (en) * | 1978-10-07 | 1980-04-11 | Daikin Ind Ltd | Blend composition for coclosslinking of new fluoroelastomer |
Also Published As
Publication number | Publication date |
---|---|
JPS60103345A (en) | 1985-06-07 |
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