JPS6091352A - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
JPS6091352A
JPS6091352A JP20176283A JP20176283A JPS6091352A JP S6091352 A JPS6091352 A JP S6091352A JP 20176283 A JP20176283 A JP 20176283A JP 20176283 A JP20176283 A JP 20176283A JP S6091352 A JPS6091352 A JP S6091352A
Authority
JP
Japan
Prior art keywords
resin composition
resin
photosensitive resin
amine imide
epoxy group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20176283A
Other languages
Japanese (ja)
Inventor
Yasuhiko Araki
泰彦 荒木
Kunio Yanagisawa
柳沢邦夫
Hajime Shiyouhi
初 松扉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP20176283A priority Critical patent/JPS6091352A/en
Publication of JPS6091352A publication Critical patent/JPS6091352A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Abstract

PURPOSE:To obtain a resin compsn. which can be thoroughly cured by short time of heating and is suitable for forming a permanent protective film by combining a polymer having an epoxy group and an amine imide. CONSTITUTION:A resin compsn. is formed of (a) an unstad. compd. which has substantially at least two ethylene groups at the terminal and is photopolymerizable, (b) a photopolymn. sensitizer, (c) a linear high polymer compd. having an epoxy group at the side chain and (d) the amine imide expressed by the formula I (R1, R4 in the formula are the aliphat. hydrocarbon having 0-6 carbon atoms that can contain oxygen atoms, R2, R3 are the aliphat. hydrocarbon having 0-6 carbon atoms). The resin is photopolymerized with the (a) and (b). The (c) functions as a high polymer for forming a film in the compsn. and acts further synergistically with the (d) to increase the mol.wt. of the resin and to crosslink the same in extremely short time at 150 deg.C thereby rendering mechanical strength and heat resistance to the resin.

Description

【発明の詳細な説明】 木発引は光重合可能なj!i像形成用感光性栴脂組成物
に関する。
[Detailed Description of the Invention] The wooden material is photopolymerizable! The present invention relates to a photosensitive resin composition for forming an i-image.

従来より、高分子材才1からなる/ぐイングー、光重合
性モノマー及び光重合増感剤などからなる樹脂組成物を
基板上に塗布あるい目被覆させ、陰画等を通して紫外線
のような活や1光を照射し、光の当った部分を重合ちる
いや;[架橋させて溶剤に対し不溶化させ、光が当たら
ない部分を溶出させることにより、上IV画仰を基板上
に現仰できることが知られており、印刷版相やプリン1
配線板の製造に利用されている、 しかし、上記の組成物で#:t f!7らiする画$1
被膜t」耐溶剤性、耐薬品性、耐熱+1およびP械的強
瓜が不充分であり、保直披膜としての使用)11.凹t
:I限られている。
Conventionally, a resin composition made of a polymeric material, a photopolymerizable monomer, a photopolymerizable sensitizer, etc. is coated or coated on a substrate, and then exposed to active light such as ultraviolet light through a negative image or the like. It is known that the above IV image can be expressed on a substrate by irradiating it with light and polymerizing the areas that are exposed to the light; by crosslinking and making the areas insoluble in the solvent and eluting the areas that are not exposed to the light. The printing plate phase and pudding 1 are
Used in the manufacture of wiring boards, however, with the above composition #:t f! 7 pictures $1
11. Coating t' solvent resistance, chemical resistance, heat resistance +1 and P mechanical strength are insufficient and use as a protective membrane)11. Concave T
:I limited.

例えに、これらの被膜は中性、弱酸イ゛ト溶液11r 
)、1耐えるが、強酸性、アルカリ溶液にけ削乏−らJ
lず、従って、エツチング、めっき等のブト埋液σ)m
類が制限される。又、トルエン、トリクレン、メチルエ
チルグトン等の有機溶剤KVi弱く、耐熱性や機械的強
度が不充分なだめ、永久的な保護被覆になし得ない。
For example, these coatings can be prepared using neutral, weakly acidic acid solution 11r.
), 1 is resistant to strong acids and alkaline solutions.
Therefore, the filling solution for etching, plating, etc.
types are limited. In addition, organic solvents such as toluene, trichlene, and methyl ethylgtone are weak in KVi and have insufficient heat resistance and mechanical strength, so they cannot be used as a permanent protective coating.

永久的な保護被覆を形成する目的で、従来エポキシ化合
的及びその硬化剤を含む系が提案されているが、これら
は室温可使時間が短かく、硬化に高温長時間を要し基板
に反りを生じさせたり、金属屑食を起こしたりする。
For the purpose of forming a permanent protective coating, systems containing epoxy compounds and their curing agents have been proposed, but these have a short pot life at room temperature, require high temperatures and long periods of time to cure, and may warp the substrate. or cause corrosion of metal chips.

又、特公昭52−430929公報、特公昭52−43
091号公報、特公昭56−3539号公報などでは、
永久的な保護被膜を形成する目的で、共重合体バインダ
ーの中に酸成分を含有させて硬化さ促進させようとして
いるが、通常の条件で#i硬化が不充分であり、はんだ
耐熱性、耐溶剤性、耐アルカリ性に弱く、更に、冷熱繰
返し特性も充分とは云えない。
Also, Special Publication No. 52-430929, Special Publication No. 52-43
In Publication No. 091, Special Publication No. 56-3539, etc.,
In order to form a permanent protective film, attempts have been made to include an acid component in the copolymer binder to accelerate curing, but #i curing is insufficient under normal conditions, and the soldering heat resistance and It is weak in solvent resistance and alkali resistance, and furthermore, its cold and heat cycling properties are not sufficient.

木発11は上記従来の欠点を解消して、貯蔵安定性に富
み、短時間の加熱で充分硬化させることができ、永久的
な保護被膜を形成させるに適した感光性樹脂組成物を提
供することを目的とする。
Kibatsu 11 solves the above-mentioned conventional drawbacks, and provides a photosensitive resin composition that has excellent storage stability, can be sufficiently cured by heating for a short time, and is suitable for forming a permanent protective film. The purpose is to

木発!1の要旨は、 (al 末端エチレン基を実質的に少なくとも2個有す
る光重合可能な不飽和化合物、 (bl 光重合増感剤、 (cl 側鎖にエポキシ基を有する線状高分子化合物、 (dl 下記一般式で表わせるアミンイミド、0 0H (R1、R4は酸素原子を含むことのできる0〜6個の
炭素原子を有する脂肪族p化水3!(、R2+ R3に
0〜6個の炭素原子を有する脂肪族炭化水素)よりなる
又t」これらを生成’tJとすることを特徴とする感光
性樹脂組成物に存する。
Kihatsu! The gist of 1 is as follows: (al: a photopolymerizable unsaturated compound having substantially at least two terminal ethylene groups; (bl: a photopolymerizable sensitizer; (cl: a linear polymer compound having an epoxy group in its side chain; dl Amine imide represented by the following general formula, 0 0H (R1, R4 are aliphatic p-hydrogen 3!(, R2+ R3 has 0 to 6 carbon atoms) A photosensitive resin composition comprising aliphatic hydrocarbon atoms).

木発EJi VCおける不飽和化合物(at t:f、
末端エチレン基を実質的に少なくとも2個有する。実質
的に少なくとも2個とけ、系内に末端エチレン基を1個
しか持たない化合物、末端エチレン基を3個以上持って
いる化合物があってもよく、全体として平均的に末端エ
チレン基が1化合物に少なくとも2個有していることを
意味する。
Kihatsu EJi Unsaturated compounds in VC (at t:f,
It has substantially at least two terminal ethylene groups. Substantially at least two, there may be compounds with only one terminal ethylene group in the system, compounds with three or more terminal ethylene groups, and overall compounds with one terminal ethylene group on average. This means that there are at least two of them.

不飽和化合物(atとしては、多価アルコールのアクリ
ル酸エステルもしくはメタクリル酸エステルが最適であ
り、具体的にtまトリエチレングリコール、テトラエチ
レンクリコール、エチレングリコール、プロピレングリ
コール、トリメチロールプロノ鳴ン、ペンタグリスリト
ール、ネオペンデルグリコール等のアクリル酸もしくは
メタクリル酸エステルが挙けられる。この成分の使用量
目感光性樹脂組成物中10〜90重量%であり、好捷し
くは15〜60重量%である。
As unsaturated compounds (at), acrylic esters or methacrylic esters of polyhydric alcohols are most suitable, and specific examples include triethylene glycol, tetraethylene glycol, ethylene glycol, propylene glycol, trimethylol promonomer, Examples include acrylic acid or methacrylic esters such as pentaglythritol and neopendel glycol.The amount of this component used in the photosensitive resin composition is 10 to 90% by weight, preferably 15 to 60% by weight. It is.

木発す口でおりる増感剤(blは、活性光の照射により
ill記不飽和化合物の重合を開始するものであり、場
合によっては主たる増感剤と、主たる増感剤の作用を増
大する従たる増感剤を組合わせて用いることがある。
A sensitizer (bl) is a sensitizer that initiates the polymerization of unsaturated compounds when irradiated with actinic light, and in some cases increases the action of the main sensitizer and the main sensitizer. A combination of secondary sensitizers may be used.

該増感剤(blは、従来から用いられる増感剤を使用し
う゛るが、内でもフェニルケトン系の増感剤が好適であ
り、具体的KViベンゾフェノン、P、P−ビス(ジメ
チルアミノ)ベンゾフェノン、〈以下ミヒラーケトンと
称する〉などのP−アミノブエニルケトン、ベンツイン
、ベンツインメチルエーテル、ベンゾインエチルエーテ
ル、ベンツインメチルエーテル、ペンゾインイソグロビ
ルエーテル、ベンジル−アンスラキノン、2−メチル−
アンスラキノン、2−エチルアンスラキl°ン、2−t
−ブチル−アンスラ−1t/ン、2−アミノアンスラキ
ノン雪が挙はうilる。
The sensitizer (bl) may be a conventionally used sensitizer, but phenylketone-based sensitizers are preferred, and specific examples include KVi benzophenone, P, P-bis(dimethylamino) Benzophenone, P-aminobuenyl ketone (hereinafter referred to as Michler's ketone), benzin, benzin methyl ether, benzoin ethyl ether, benzin methyl ether, penzoin isoglobyl ether, benzyl anthraquinone, 2-methyl-
Anthraquinone, 2-ethyl anthraquinone, 2-t
-butyl-anthraquinone, 1 t/ton, 2-aminoanthraquinone.

上記の増感剤tb+は、同様の作用を行なうもので、活
性光の吸収域が異なるものをill右わせ′C1重合開
始効率を改各させ、露光時間をより短縮させることがで
きる。特に、ベンゾフェノンとミトラーグトンの混合物
などが好適である。この成分の使用量は、感光性樹脂組
成物中0.01〜15重量%てあり、好捷しく打l00
1〜10重R%である。
The above-mentioned sensitizer tb+ performs the same function, and by adjusting the active light absorption range different from that of the sensitizer tb+, it can change the C1 polymerization initiation efficiency and further shorten the exposure time. Particularly suitable is a mixture of benzophenone and mitragtone. The amount of this component used is 0.01 to 15% by weight in the photosensitive resin composition, and
It is 1 to 10% by weight.

次に、来光IJJ Kおける線状高分子化合物(cl 
fi、fl!l 舘にエポキシ基を有するものであり、
例えばグリシジルメタクリレートやグリシジルアクリレ
ートの様なエポキシ基含有アクリル糸モノマーを単独重
合ちるいはビニル単量体と共重合させることKよって容
易KtT)もれる。
Next, the linear polymer compound (cl
Fi, fl! l It has an epoxy group in the base,
For example, by homopolymerizing or copolymerizing an epoxy group-containing acrylic yarn monomer such as glycidyl methacrylate or glycidyl acrylate with a vinyl monomer, leakage can easily occur.

線状高分子化合物(clの具体例としては、メタクリル
酸メチル−グリシジルメタクリレート共重合体、メタク
リル酸メチル−グリシジルメタクリ1/−トーアクリロ
ニトリル共重合体、アクリル酸エヂルーグリシジルアク
リレートースヂレン共重合体、メククリル酸ペンジルー
グリシジルメククリレートースチレン共重合体等を挙は
得る。線状Is分子化合物(cl中、エポキシ基含有1
1爪体e、分は1〜70重景%、好適には5〜40重量
%占めるものがよい。該線状高分子化合物[clの使用
員は、感光性高分組成物中10〜90重量%であり、好
オしくけ30〜70重景%でちる。
Linear polymer compounds (specific examples of cl include methyl methacrylate-glycidyl methacrylate copolymer, methyl methacrylate-glycidyl methacrylate 1/-to-acrylonitrile copolymer, edyl acrylate-glycidyl acrylate styrene copolymer) Copolymerization, pendyl meccrylate-glycidyl meccrylate-styrene copolymer, etc. are obtained.A linear Is molecule compound (in Cl, epoxy group-containing 1
The single claw body should preferably account for 1 to 70% by weight, preferably 5 to 40% by weight. The amount of the linear polymer compound [cl] in the photosensitive polymer composition is 10 to 90% by weight, preferably 30 to 70% by weight.

水成分、線状高分子化合物(cl #′i、組成物中で
被膜形成性高分子として機能し、31!忙次に脱11〕
るアミンイミドと相乗的に反応12.150″C′程度
で非常傾短時間に高分子量化、架橋化するところに特徴
がある。それ故に重量平均高分子量は1万〜50万であ
り、好捷しく目10万〜30万でちる。余り低分子量で
は硬化に時間が掛かる欠点があり、50万を越える分子
量になると硬化が速すぎて制御しKくNなったり、取扱
いに非常な注意を要するようになる。
Water component, linear polymer compound (cl #'i, functions as a film-forming polymer in the composition, and is removed after 31!
It is characterized in that it reacts synergistically with amine imide of about 12.150"C' and is capable of high molecular weight and crosslinking in a very short time. Therefore, the weight average high molecular weight is 10,000 to 500,000, making it a good choice. Chills between 100,000 and 300,000.If the molecular weight is too low, it will take a long time to cure.If the molecular weight exceeds 500,000, the curing will be too fast and the temperature will be too low to control, requiring extreme care in handling. It becomes like this.

本発明の1つの特徴は、線状高分子化合物(cl Kよ
り被膜形成性を持たせ、しかも150℃程度で短時聞に
硬化させることにより、精密基板等に反りや腐食を起こ
させることなく機械的強度、耐熱性が充分な保膜被膜を
形成しうるとζろにあり、更に感光性高分子組成物とし
て可使時間が充分長いものである点である。
One of the features of the present invention is that the linear polymer compound (CLK) has better film-forming properties and can be cured in a short period of time at about 150°C, without causing warping or corrosion on precision substrates, etc. It is possible to form a protective film with sufficient mechanical strength and heat resistance, and furthermore, it has a sufficiently long pot life as a photosensitive polymer composition.

本発明感光性樹脂m酸物の構成成分の一つとして、下記
一般式で表わされるアミンイミド(dlがある。
One of the constituent components of the photosensitive resin m-acid of the present invention is amine imide (dl) represented by the following general formula.

O0H (R1,R4#″i酸素原子を含むことのできる0〜6
個の炭素原子を有する脂肪族炭化水素、R2+ R3は
0〜6個の炭素原子を有する脂肪族炭化水素) 従来、エポキシ化合物を用いた感光性梅脂組成物におい
て、エポキシ化合物の潜在硬化剤としては、三フッ化ホ
ク累モノエヅルアミン、三フッ化ホウ素ベンジルアミン
錯体、四フッ化ホク棄酸塩、アジピン酸、ジヒドラジド
、トリエチルアミノボラン、フェニレンジアミン−臭化
亜鉛錯体、ジシアンジアミド等があるが、室温可使時間
が卸か過ぎて、保存が不可能である。
O0H (R1, R4 #″i 0 to 6 that can contain oxygen atoms
(R2+ R3 is an aliphatic hydrocarbon having 0 to 6 carbon atoms) Conventionally, in a photosensitive plum fat composition using an epoxy compound, it has been used as a latent hardening agent for the epoxy compound. Examples include monoedulamine trifluoride, boron trifluoride benzylamine complex, sulfate tetrafluoride, adipic acid, dihydrazide, triethylaminoborane, phenylenediamine-zinc bromide complex, and dicyandiamide. The usage time is so long that it is impossible to save it.

室温可使時間の長い潜在硬化剤としてI’、P’−ジア
ミノジフェニルメタン、P 、 P’−ジアミノジフェ
ニルスルホン酸、2−エチル4−エチルイミダゾール等
も見い出されているが、硬化に高温、長時間を要するた
め、基板妬反りを生じたり、加工時間が長びいて好まし
くない。
I', P'-diaminodiphenylmethane, P, P'-diaminodiphenylsulfonic acid, 2-ethyl 4-ethylimidazole, etc. have also been found as latent curing agents with a long pot life at room temperature, but they require high temperatures and long periods of time for curing. This is undesirable because it may cause the substrate to warp or prolong the processing time.

又、上記の従来の潜在硬化剤でIJ、全屈表面の基板に
拡散していき、精密電気回路の1@気的竹質妊悪影響を
及はすこ七があり、プリント配線板の製造シては向いて
いなかった。
In addition, the conventional latent curing agent mentioned above diffuses into the IJ and fully curved surface of the substrate, which has a negative effect on precision electrical circuits, and is used in the production of printed wiring boards. was not suitable.

そこで鋭意研究の結果、来光りI’fが見い出した一般
式(I)のアミンイミド(di fi、 、將光性祠脂
組成物として室温可使時間が充分長く、適度な?、A度
、短かい時間で硬化し、永久的な保隈被I!を形成した
場合、優れた耐溶剤+1、耐アルカリ+1、はんだ耐熱
性が得られるのである。
As a result of intensive research, Raikori I'f discovered that the amine imide (di fi) of the general formula (I) has a sufficiently long pot life at room temperature as a phosphorescent abrasive composition, and has an appropriate level of ?, A degree, and short If it cures in a long time and forms a permanent protective coating, excellent solvent resistance +1, alkali resistance +1, and solder heat resistance can be obtained.

上記一般式(I)のアミンイミド(diは、R1−R4
の脂肪族炭化水素が艮過ぎたり、芳香族基が含まれると
充分な耐熱性等が得られなくなる。
Amine imide of the above general formula (I) (di is R1-R4
If too much aliphatic hydrocarbon is present or aromatic groups are included, sufficient heat resistance etc. will not be obtained.

R2,R3けメヂル基、ニヂルハが好ちしく、最大はヘ
キシル基迄が実用的である。R1、R4も炭素数#−i
6以下が適当でちり、中に酸素原子をエーテル結合の形
で含んでもよい。R1、R4で最も適しているのり、炭
素−m素の二重^17合を有する場合である。
Preferably, R2 and R3 are a methyl group or a nitro group, and up to a hexyl group is practical. R1 and R4 also have carbon number #-i
It is preferably 6 or less, and may contain an oxygen atom in the form of an ether bond. The most suitable bond for R1 and R4 is the case where the carbon-m element has a double ^17 bond.

これらの理由111FI停ではないが、一般式(I)の
アミンイミド(diが感光性樹脂組成物中で均一に分散
する適度な極性を持ち、ズリードアクトして基板表面に
悪影響を与えないと考えられる。
These reasons are not due to 111FI termination, but it is believed that the amine imide (di) of the general formula (I) has appropriate polarity to be uniformly dispersed in the photosensitive resin composition and will not lead to adverse effects on the substrate surface. It will be done.

又、J + R4が二重結合を含む場合、活性光照射で
重合系に取込まれ、分散性及び線状高分子化合物(cl
の硬化に好影智が現われると推定される。
In addition, when J + R4 contains a double bond, it is incorporated into the polymerization system by actinic light irradiation, improving dispersibility and linear polymer compound (cl
It is presumed that Yoshikage Satoshi appears in the hardening of.

しかも、上記の範囲のアミンイミド(di V′i、1
50℃程度で、10〜30分の短助同で急速KM状高分
子化合物(clを硬化さ−I)、%れだ耐アルカリ性が
得られ、又、耐溶剤件やはんだ耐熱t’lが向1−シ、
更に冷熱緑返し軽性匠も優れた弾手す々保護被膜が得ら
れるのである。
Moreover, the amine imide (di V′i, 1
Rapid KM-like polymer compound (Cl-I) can be cured in a short time of 10 to 30 minutes at about 50℃, and sagging alkali resistance can be obtained, and solvent resistance and soldering heat resistance can be obtained. Direction 1-shi,
In addition, the lightness of the cold and heat green coating also provides an excellent protective coating for the gun.

アミンイミドfdlの使用fii、111f%光性倒脂
組成物中02〜12重量%が好適々札囲である。
Aminimide fdl is preferably used in an amount of 02 to 12% by weight in the 111f% photosensitive fat composition.

未発り1の感光性樹脂組成物tま以上の必須成分に加え
て、種々の目的のために更に副次的な成分を含有せしめ
ることが可能である。
In addition to the above-mentioned essential components of the unreleased photosensitive resin composition 1, it is possible to further contain secondary components for various purposes.

即ち貯蔵安定性改善のだめの熱重合禁止剤、被膜特性改
善のための可塑剤、密着改良剤、染1、顔料、その他の
充填剤等である。
That is, thermal polymerization inhibitors for improving storage stability, plasticizers for improving coating properties, adhesion improvers, dyes 1, pigments, and other fillers.

本発明の感光樹脂組成物を1、通常の感光性樹脂と同様
に感光性を有し、活性光の照射により光重合を起こし、
又、80℃以下でVi熱的に充分安定であり、常法によ
り永久的な保護被膜を形成しうる。
1. The photosensitive resin composition of the present invention has photosensitivity similar to ordinary photosensitive resins, and undergoes photopolymerization by irradiation with actinic light.
Furthermore, it is sufficiently stable in Vi thermal terms at temperatures below 80°C, and a permanent protective film can be formed by conventional methods.

即ち、未発FJ1の感光性樹脂組成物を通?tt t:
j、 3〜60重ゑ%の濃度になるように、メチルエチ
ルケトン、トルエン、メチルセロソルブ、クロロホルム
等の有機溶剤に溶解させて、液を調整し、下記(1)あ
るいけ(2)の方法で保護すべき基板、」−に感光層を
形成させる。
That is, through the photosensitive resin composition of unreleased FJ1? tt t:
j. Adjust the solution by dissolving it in an organic solvent such as methyl ethyl ketone, toluene, methyl cellosolve, or chloroform to a concentration of 3 to 60% by weight, and protect it using the method (1) or (2) below. A photosensitive layer is formed on the substrate to be treated.

(1)感光樹脂組成物を溶解した泄を基板−1−に塗布
し乾燥する。
(1) Apply a solution containing the photosensitive resin composition to the substrate-1- and dry it.

(2) [8光柑脂組成物を溶解した液をボIJ j−
チレンテレ7クレート管のフィルムに塗布し乾燥する。
(2) [8] Boil the liquid in which the light citrus composition was dissolved.
Apply to the film of Chilentele 7 crate tube and dry.

得られたフィルトを熱ロールを用いて基板に貼合わせる
。この場合、フィルムの感光N&ζ保置装ィルムを重ね
て保γf−することもちる。
The obtained filter is attached to a substrate using a hot roll. In this case, it is also possible to stack the photosensitive N & ζ storage films of the film to maintain γf-.

感光層を形成した基板に対し、ネガマスクを通して紫(
FPA々どの活性光を照射し、露光部を光重合、架橋に
より硬化さ一亡る。次いで、1,1、l−)リクロルエ
タン等を用いて、未露光部を溶出して現像を行なう。こ
うして、得られた画像的な保護被膜t」通常のエツチン
グ、めっき等の表面変性加工のための耐食膜となるが、
更に、150℃程度で1時間以内の短時間の加熱硬化匠
より、耐熱性及び1(械的強度に優)1だ氷グトン溶剤
、二塩化メチレン等のハロゲン化R化水素先の溶剤に侵
さJlず、又、強酸、アルカリ水溶液しても充の耐える
。従って、はんだ耐熱性VCfFEれたツルグーレジス
ト等の永久的な保護被膜として使用し得る。尚、加熱硬
化に先立って、紫外線などを1〜3 Jlcrlの強さ
で後露光すること((より、僕れた強度を有する保護被
膜を形成することもできる。
Violet (purple) is applied to the substrate on which the photosensitive layer is formed through a negative mask.
The FPA is irradiated with active light, and the exposed areas are photopolymerized and cured by crosslinking. Next, the unexposed areas are eluted and developed using 1,1,1-)lichloroethane or the like. In this way, the obtained image-like protective film becomes a corrosion-resistant film for ordinary surface modification processing such as etching and plating.
In addition, heat curing for a short period of time at around 150°C within 1 hour provides excellent heat resistance and 1 (excellent mechanical strength) resistance to corrosion by halogenated R-hydrogen solvents such as ice cream solvents and methylene dichloride. It also withstands strong acid and alkaline aqueous solutions. Therefore, it can be used as a permanent protective coating for soldering heat resistant VCfFE resists and the like. In addition, prior to heat curing, post-exposure to ultraviolet rays or the like at an intensity of 1 to 3 Jlcrl (by doing so, it is also possible to form a protective film having a lower strength).

感光性塗料、プラスデックレリーフ、印刷Fj、H料と
しても用い得る。
It can also be used as photosensitive paint, plus deck relief, printing Fj, H material.

以下に本発明の実施例を説明する。Examples of the present invention will be described below.

40)(Mw−21万)C!Aダクリレqト共重合豚 
40都 ペンタエリスリ)−ルトリアクリレート30部ベンゾフ
ェノン 3部 ミヒラーケトン 05部 P−メトキシフェノール 0.5部 アミンイミド(ト記の化合4’り) 1部メヂルエヂル
ケトン 2()0部 0 0H 表 1 上記の配合で感光性樹脂組成物を1VllJ整し、#1
1張枦層板上に塗布し、室温でIO+)、80’Cで1
0分乾燥17て5 G // mの厚みの感光層とした
40) (Mw-210,000) C! A dacrylate copolymer pig
40 parts pentaerythriol triacrylate 30 parts Benzophenone 3 parts Michler's ketone 05 parts P-methoxyphenol 0.5 parts Amine imide (compound 4') 1 part Medyl edyl ketone 2() 0 parts 0H Table 1 Above The photosensitive resin composition was adjusted to 1VllJ with the formulation #1
IO+) at room temperature and 1 at 80'C.
The photosensitive layer was dried for 0 minutes and had a thickness of 5 G//m.

次Kfx光層を厚さ25μmの透り1なポリエチレンテ
レフタレートフィルムで被覆し、ネガマスクを通して賞
出水銀灯から100 mJ/lylの紫外線を照射した
。ポリエチレンテレフタレートフィルムを剥離し、1,
1.1−トリクロロエタンを90秒向スプレーして未露
光部を溶出し現像を行なった。次いで150℃で10分
加熱処理を行なった(実施例2.3VCついては150
℃、5分の加熱処理)所、ネガマスクに相応する精密な
像を有する保護被膜が得られた。
Next, the Kfx light layer was covered with a transparent polyethylene terephthalate film having a thickness of 25 μm, and was irradiated with ultraviolet rays of 100 mJ/lyl from a Shode mercury lamp through a negative mask. Peel off the polyethylene terephthalate film, 1.
1.1-Trichloroethane was sprayed in the direction for 90 seconds to elute the unexposed areas and development was performed. Next, heat treatment was performed at 150°C for 10 minutes (for Example 2.3 VC, 150°C
After heating for 5 minutes at 50° C., a protective film with a precise image corresponding to a negative mask was obtained.

この保護被膜はメチルエチルケトン、アセトン、クロロ
ホルム、トリクレン、メタノール、50%硫酸水溶液、
トルエン、キシレンに−jれぞれ1日同浸漬しても何の
変化もなく、更に、70℃でP II 12の水酸化ナ
トリウム水溶液に1日間浸漬しても、伺ら異常が耐めら
れなかった。
This protective coating consists of methyl ethyl ketone, acetone, chloroform, trichlene, methanol, 50% sulfuric acid aqueous solution,
There was no change when immersed in toluene and xylene for 1 day, and even when immersed in a sodium hydroxide solution of P II 12 at 70°C for 1 day, no abnormalities were observed. There wasn't.

又、60分間隔で一65℃と125℃の冷却加熱を繰返
し、更に260〜270℃のけんだ浴に2時間浸漬して
も変化がなかった。以上のことから、得られた保護被膜
#[、エツチング、めっき、強アルカリ性態mmめっき
用レジストとしても、はんだ耐熱性が要求されるソルダ
ーレジストとしても充分に使用できることが分かった。
Further, there was no change even after repeated cooling and heating at -65°C and 125°C at 60 minute intervals, and further immersion in a simmering bath at 260-270°C for 2 hours. From the above, it has been found that the obtained protective coating # can be satisfactorily used as a resist for etching, plating, strong alkaline mm plating, and as a solder resist that requires soldering heat resistance.

〈実施例4〉 メククリル酸ベンジル/グリシジルメタクリレート/ス
チレン共重合体(60対30対io)(Rlw−20万
) 60部 ペンタエリスリトールトリアクリレート30部ペンツイ
ンイソフロビルエーテル 5部P−メトキシフェノール
 0.5部 アミンイミド(表1の化合物) 2部 メチルエチルケトン 100部 上記配合で得た感光性樹脂組成物を25μmの厚みのボ
リエ°チレンテレフタレート上に塗布乾燥17.50 
p mの厚みの感光層を形成した。清浄処理した。銅板
−にに熱ロールを用いて加圧積層した。
<Example 4> Benzyl meccrylate/glycidyl methacrylate/styrene copolymer (60:30:io) (Rlw - 200,000) 60 parts Pentaerythritol triacrylate 30 parts Pentuin isofuroyl ether 5 parts P-methoxyphenol 0 .5 parts amine imide (compounds shown in Table 1) 2 parts methyl ethyl ketone 100 parts The photosensitive resin composition obtained with the above formulation was coated on a 25 μm thick polyester ethylene terephthalate and dried for 17.5 minutes.
A photosensitive layer having a thickness of pm was formed. Cleaned. The copper plates were laminated under pressure using a hot roll.

そして、実施例10力法に準じて露光、現像を行ない、
150℃5分同の加熱処理を行ない、実施例1と同様の
試駆で同等の結果を得た。又、ポリエチレンテレフタレ
ートフィルムtut!布N燥し六層光W1は40℃で6
ケ月保存しても、使用VCは全く差支えなかった。
Then, exposure and development were carried out according to the force method of Example 10,
The same heat treatment was performed at 150° C. for 5 minutes, and the same results as in Example 1 were obtained. Also, polyethylene terephthalate film tut! Cloth N dried 6-layer light W1 at 40℃ 6
Even after storage for several months, there was no problem with the VC used.

〈比較例1、λ〉 実施例IKおけるアミンイミドを表1のものに換え、同
じ試験(150℃、30分の加熱硬化)を行なった所、
メチルエチルケトン、アセトン、クロロホルムに浸漬し
た所、1時間以内のしか耐性がなく、冷却加熱繰返しに
おいても5ツ”イクルで基板との聞に剥離及びクラック
が見られた。
<Comparative Example 1, λ> When the amine imide in Example IK was replaced with that in Table 1 and the same test (heat curing at 150°C for 30 minutes) was conducted,
When immersed in methyl ethyl ketone, acetone, or chloroform, the resistance was only within one hour, and even after repeated cooling and heating, peeling and cracking were observed between the substrate and the substrate after 5 cycles.

〈比較例3〉 実施例IKおけるアミンイミドの換りに1ジシアンジア
ミドを用いた。しかし、得られた感光性樹脂組成物は4
0℃で1日しか可使時聞けなかった。又、露光、現像し
た律150℃、30分で加熱硬化したものは、260℃
の1まんだ洛中で30秒で被膜が溶融し、冷却加熱繰返
しでは5ザイクルでクラックを生じた。次いで、170
℃、3時間で加熱硬化したものけ、耐熱性は向上したが
、基板が高温のだめ反り、硬化に長時間を要するだめ製
造が煩雑になった。
Comparative Example 3 1-dicyandiamide was used in place of the amine imide in Example IK. However, the obtained photosensitive resin composition was
It was only usable for one day at 0℃. In addition, those exposed and developed at 150°C for 30 minutes and cured by heating are 260°C.
The coating melted in 30 seconds during one round of heating, and cracks occurred after 5 cycles of repeated cooling and heating. Then 170
C. for 3 hours, the heat resistance improved, but the substrate warped due to high temperatures, and hardening took a long time, making manufacturing complicated.

以上の様に1本発171g光性劉脂組成物は、貯蔵安定
性に優れ、硬化の際tま比較的低温で短時間に充分に反
応が進行し、しかも耐溶剤性、耐アルカリ性、耐熱性が
良好な保護被膜を形成しうる。
As mentioned above, the 171g photosensitive rhubarb composition has excellent storage stability, the reaction progresses satisfactorily in a short time at a relatively low temperature during curing, and it is resistant to solvents, alkalis, and heat. A protective film with good properties can be formed.

6゛W「出Fi人 積水化学工業株式会社 代表者 虎 沼 基 利6゛W “Ex-Fi person” Sekisui Chemical Co., Ltd. Representative Mototoshi Tora Numa

Claims (1)

【特許請求の範囲】 1(a)末端エチレン基を実質的匠少なくとも2個有す
る光重合”J能か不飽和化合物、 (bl光重合増υ剤、 (cl側鎖にエポキシ基を有−する線状高分子化合物、
(dl下記一般式で表わせるアミンイミド°、0 01
1 (R,、R4)1酸索厚子を含むことのできる0〜6個
の#1 素原子を有する脂肪族炭化水素、R2+ R3
打tO〜6個の炭素原子を有する脂肪族炭化水素)より
なる又りこれらを主成分とすることを特徴とする感光件
樹脂組成物。 2 アミンイミドが、一般式(1) において、脂肪族
炭化水素R1、R4が炭素−P、!素の二重結合を有す
るものである第1項記載の感薯性樹脂組成物。
[Scope of Claims] 1(a) A photopolymerizable unsaturated compound having at least two substantial terminal ethylene groups, (bl photopolymerization enhancer, (cl having an epoxy group in the side chain) linear polymer compound,
(dl Aminimide expressed by the following general formula °, 0 01
1 (R,,R4)Aliphatic hydrocarbon having 0 to 6 #1 elementary atoms which may contain 1 acid atom, R2+ R3
1. A photosensitive resin composition characterized in that the main component is an aliphatic hydrocarbon having 6 to 6 carbon atoms. 2 The amine imide is represented by the general formula (1), where the aliphatic hydrocarbons R1 and R4 are carbon-P,! 2. The sensitive resin composition according to item 1, which has an elementary double bond.
JP20176283A 1983-10-26 1983-10-26 Photosensitive resin composition Pending JPS6091352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20176283A JPS6091352A (en) 1983-10-26 1983-10-26 Photosensitive resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20176283A JPS6091352A (en) 1983-10-26 1983-10-26 Photosensitive resin composition

Publications (1)

Publication Number Publication Date
JPS6091352A true JPS6091352A (en) 1985-05-22

Family

ID=16446508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20176283A Pending JPS6091352A (en) 1983-10-26 1983-10-26 Photosensitive resin composition

Country Status (1)

Country Link
JP (1) JPS6091352A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6410235A (en) * 1987-07-02 1989-01-13 Hitachi Chemical Co Ltd Photosensitive resin composition
EP0942331A4 (en) * 1997-10-08 2000-07-26 Clariant Finance Bvi Ltd Antireflection or light-absorbing coating composition and polymer therefor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509035A (en) * 1973-05-31 1975-01-30
JPS5243092A (en) * 1975-10-01 1977-04-04 Hitachi Ltd Nuclear reactor
JPS6088940A (en) * 1983-10-21 1985-05-18 Sekisui Chem Co Ltd Photosensitive resin composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509035A (en) * 1973-05-31 1975-01-30
JPS5243092A (en) * 1975-10-01 1977-04-04 Hitachi Ltd Nuclear reactor
JPS6088940A (en) * 1983-10-21 1985-05-18 Sekisui Chem Co Ltd Photosensitive resin composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6410235A (en) * 1987-07-02 1989-01-13 Hitachi Chemical Co Ltd Photosensitive resin composition
EP0942331A4 (en) * 1997-10-08 2000-07-26 Clariant Finance Bvi Ltd Antireflection or light-absorbing coating composition and polymer therefor

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