JPH0327106B2 - - Google Patents

Info

Publication number
JPH0327106B2
JPH0327106B2 JP58212262A JP21226283A JPH0327106B2 JP H0327106 B2 JPH0327106 B2 JP H0327106B2 JP 58212262 A JP58212262 A JP 58212262A JP 21226283 A JP21226283 A JP 21226283A JP H0327106 B2 JPH0327106 B2 JP H0327106B2
Authority
JP
Japan
Prior art keywords
group
compound
resin composition
groups
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58212262A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60103344A (ja
Inventor
Kunio Yanagisawa
Yasuhiko Araki
Hajime Shobi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP21226283A priority Critical patent/JPS60103344A/ja
Publication of JPS60103344A publication Critical patent/JPS60103344A/ja
Publication of JPH0327106B2 publication Critical patent/JPH0327106B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP21226283A 1983-11-10 1983-11-10 感光性樹脂組成物 Granted JPS60103344A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21226283A JPS60103344A (ja) 1983-11-10 1983-11-10 感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21226283A JPS60103344A (ja) 1983-11-10 1983-11-10 感光性樹脂組成物

Publications (2)

Publication Number Publication Date
JPS60103344A JPS60103344A (ja) 1985-06-07
JPH0327106B2 true JPH0327106B2 (enrdf_load_stackoverflow) 1991-04-12

Family

ID=16619663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21226283A Granted JPS60103344A (ja) 1983-11-10 1983-11-10 感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JPS60103344A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3131448A1 (de) * 1981-08-07 1983-02-24 Basf Ag, 6700 Ludwigshafen Fuer die herstellung von photoresistschichten geeignete photopolymerisierbare aufzeichnungsmasse

Also Published As

Publication number Publication date
JPS60103344A (ja) 1985-06-07

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