JPH0330258B2 - - Google Patents
Info
- Publication number
- JPH0330258B2 JPH0330258B2 JP53015306A JP1530678A JPH0330258B2 JP H0330258 B2 JPH0330258 B2 JP H0330258B2 JP 53015306 A JP53015306 A JP 53015306A JP 1530678 A JP1530678 A JP 1530678A JP H0330258 B2 JPH0330258 B2 JP H0330258B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic
- test
- probe
- potential
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 claims description 78
- 239000000523 sample Substances 0.000 claims description 40
- 238000010894 electron beam technology Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 9
- 238000005036 potential barrier Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims 1
- 238000011990 functional testing Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- XAGFODPZIPBFFR-NJFSPNSNSA-N Aluminium-29 Chemical compound [29Al] XAGFODPZIPBFFR-NJFSPNSNSA-N 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000979 retarding effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
- G01R31/306—Contactless testing using electron beams of printed or hybrid circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measurement Of Current Or Voltage (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5835/77A GB1594597A (en) | 1977-02-11 | 1977-02-11 | Electron probe testing analysis and fault diagnosis in electronic circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53121476A JPS53121476A (en) | 1978-10-23 |
| JPH0330258B2 true JPH0330258B2 (fr) | 1991-04-26 |
Family
ID=9803533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1530678A Granted JPS53121476A (en) | 1977-02-11 | 1978-02-13 | Method of testing electronic circuit network |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS53121476A (fr) |
| DE (1) | DE2805673A1 (fr) |
| FR (1) | FR2380556A1 (fr) |
| GB (1) | GB1594597A (fr) |
| NL (1) | NL7801558A (fr) |
| SE (1) | SE425869B (fr) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2902495A1 (de) * | 1979-01-23 | 1980-07-31 | Siemens Ag | Einrichtung zur beruehrungslosen potentialmessung |
| DE3036713A1 (de) * | 1980-09-29 | 1982-05-13 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und anordnung zur quantitativen potentialmessung an oberflaechenwellenfiltern |
| DE3110140A1 (de) * | 1981-03-16 | 1982-09-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung und verfahren fuer eine rasche interne logikpruefung an integrierten schaltungen |
| DE3138926A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik |
| DE3138990A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Koaxiales gegenfeld-spektrometer hoher akzeptanz fuersekundaerelektronen und elektronenstrahl-messgeraet |
| DE3138901A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Verbessertes gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik |
| DE3206309A1 (de) * | 1982-02-22 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb |
| DE3232671A1 (de) * | 1982-09-02 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt |
| DE3235698A1 (de) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung |
| JPH0646550B2 (ja) * | 1985-08-19 | 1994-06-15 | 株式会社東芝 | 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置 |
| EP0264481B1 (fr) * | 1986-10-23 | 1992-05-13 | International Business Machines Corporation | Procédé de test dans le vide pour substrats de circuits intégrés employant un laser |
| DE3719202A1 (de) * | 1987-06-09 | 1988-12-29 | Siemens Ag | Verfahren zur automatischen pruefung von elektrischen baugruppen |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093078A (fr) * | 1973-12-17 | 1975-07-24 | ||
| JPS51108569A (en) * | 1975-03-19 | 1976-09-25 | Hitachi Ltd | Sosadenshikenbikyo mataha ruijisochi |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3549999A (en) * | 1968-06-05 | 1970-12-22 | Gen Electric | Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit |
| GB1286454A (en) * | 1968-08-24 | 1972-08-23 | Cambridge Scientific Instr Ltd | Surface potential analysis by electron beams |
| DE1946931A1 (de) * | 1969-09-17 | 1971-03-18 | Gen Electric | Verfahren zum Pruefen von Schaltungen und Vorrichtung zur Ausfuehrung des Verfahrens |
| US3796947A (en) * | 1973-02-27 | 1974-03-12 | Bell Telephone Labor Inc | Electron beam testing of film integrated circuits |
-
1977
- 1977-02-11 GB GB5835/77A patent/GB1594597A/en not_active Expired
-
1978
- 1978-02-09 SE SE7801530A patent/SE425869B/sv not_active IP Right Cessation
- 1978-02-10 DE DE19782805673 patent/DE2805673A1/de not_active Withdrawn
- 1978-02-10 NL NL7801558A patent/NL7801558A/xx not_active Application Discontinuation
- 1978-02-10 FR FR7803839A patent/FR2380556A1/fr active Granted
- 1978-02-13 JP JP1530678A patent/JPS53121476A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093078A (fr) * | 1973-12-17 | 1975-07-24 | ||
| JPS51108569A (en) * | 1975-03-19 | 1976-09-25 | Hitachi Ltd | Sosadenshikenbikyo mataha ruijisochi |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2805673A1 (de) | 1978-08-17 |
| JPS53121476A (en) | 1978-10-23 |
| SE425869B (sv) | 1982-11-15 |
| FR2380556B1 (fr) | 1985-02-08 |
| FR2380556A1 (fr) | 1978-09-08 |
| NL7801558A (nl) | 1978-08-15 |
| SE7801530L (sv) | 1978-08-12 |
| GB1594597A (en) | 1981-07-30 |
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