JPH0329547B2 - - Google Patents

Info

Publication number
JPH0329547B2
JPH0329547B2 JP56086219A JP8621981A JPH0329547B2 JP H0329547 B2 JPH0329547 B2 JP H0329547B2 JP 56086219 A JP56086219 A JP 56086219A JP 8621981 A JP8621981 A JP 8621981A JP H0329547 B2 JPH0329547 B2 JP H0329547B2
Authority
JP
Japan
Prior art keywords
polishing
disk
polishing head
rotary table
angular velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56086219A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57201163A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56086219A priority Critical patent/JPS57201163A/ja
Publication of JPS57201163A publication Critical patent/JPS57201163A/ja
Publication of JPH0329547B2 publication Critical patent/JPH0329547B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP56086219A 1981-06-04 1981-06-04 Disk abrasive device Granted JPS57201163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56086219A JPS57201163A (en) 1981-06-04 1981-06-04 Disk abrasive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56086219A JPS57201163A (en) 1981-06-04 1981-06-04 Disk abrasive device

Publications (2)

Publication Number Publication Date
JPS57201163A JPS57201163A (en) 1982-12-09
JPH0329547B2 true JPH0329547B2 (enrdf_load_stackoverflow) 1991-04-24

Family

ID=13880663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56086219A Granted JPS57201163A (en) 1981-06-04 1981-06-04 Disk abrasive device

Country Status (1)

Country Link
JP (1) JPS57201163A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106029A (ja) * 1983-11-14 1985-06-11 Fujitsu Ltd 磁気デイスクの製造装置
JPS62193765A (ja) * 1986-02-18 1987-08-25 Hitachi Electronics Eng Co Ltd デイスク基板の研摩方法
JPS6455739A (en) * 1987-08-27 1989-03-02 Tdk Corp Method and device for magnetic disk substrate processing
JPH06231454A (ja) * 1993-02-02 1994-08-19 Nec Corp 磁気ディスク表面研磨装置

Also Published As

Publication number Publication date
JPS57201163A (en) 1982-12-09

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