JPH0328559Y2 - - Google Patents

Info

Publication number
JPH0328559Y2
JPH0328559Y2 JP1985199610U JP19961085U JPH0328559Y2 JP H0328559 Y2 JPH0328559 Y2 JP H0328559Y2 JP 1985199610 U JP1985199610 U JP 1985199610U JP 19961085 U JP19961085 U JP 19961085U JP H0328559 Y2 JPH0328559 Y2 JP H0328559Y2
Authority
JP
Japan
Prior art keywords
belt conveyor
belt
substrate
guide
rotating shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985199610U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62109498U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985199610U priority Critical patent/JPH0328559Y2/ja
Publication of JPS62109498U publication Critical patent/JPS62109498U/ja
Application granted granted Critical
Publication of JPH0328559Y2 publication Critical patent/JPH0328559Y2/ja
Expired legal-status Critical Current

Links

JP1985199610U 1985-12-27 1985-12-27 Expired JPH0328559Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985199610U JPH0328559Y2 (pm) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985199610U JPH0328559Y2 (pm) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109498U JPS62109498U (pm) 1987-07-13
JPH0328559Y2 true JPH0328559Y2 (pm) 1991-06-19

Family

ID=31161394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985199610U Expired JPH0328559Y2 (pm) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0328559Y2 (pm)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136447A (ja) * 1985-12-10 1987-06-19 Nippon Kogaku Kk <Nikon> 基板の搬送装置

Also Published As

Publication number Publication date
JPS62109498U (pm) 1987-07-13

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