JPH0325123Y2 - - Google Patents
Info
- Publication number
- JPH0325123Y2 JPH0325123Y2 JP9723383U JP9723383U JPH0325123Y2 JP H0325123 Y2 JPH0325123 Y2 JP H0325123Y2 JP 9723383 U JP9723383 U JP 9723383U JP 9723383 U JP9723383 U JP 9723383U JP H0325123 Y2 JPH0325123 Y2 JP H0325123Y2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- film
- laser
- light
- monitoring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012806 monitoring device Methods 0.000 claims description 11
- 239000010408 film Substances 0.000 description 21
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9723383U JPS604905U (ja) | 1983-06-23 | 1983-06-23 | 膜厚モニタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9723383U JPS604905U (ja) | 1983-06-23 | 1983-06-23 | 膜厚モニタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS604905U JPS604905U (ja) | 1985-01-14 |
| JPH0325123Y2 true JPH0325123Y2 (enrdf_load_stackoverflow) | 1991-05-31 |
Family
ID=30231377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9723383U Granted JPS604905U (ja) | 1983-06-23 | 1983-06-23 | 膜厚モニタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS604905U (enrdf_load_stackoverflow) |
-
1983
- 1983-06-23 JP JP9723383U patent/JPS604905U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS604905U (ja) | 1985-01-14 |
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