JPS604905U - 膜厚モニタ装置 - Google Patents

膜厚モニタ装置

Info

Publication number
JPS604905U
JPS604905U JP9723383U JP9723383U JPS604905U JP S604905 U JPS604905 U JP S604905U JP 9723383 U JP9723383 U JP 9723383U JP 9723383 U JP9723383 U JP 9723383U JP S604905 U JPS604905 U JP S604905U
Authority
JP
Japan
Prior art keywords
film thickness
monitor device
laser generator
thickness monitor
monitoring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9723383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325123Y2 (enrdf_load_stackoverflow
Inventor
浦出　美信
保彦 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Priority to JP9723383U priority Critical patent/JPS604905U/ja
Publication of JPS604905U publication Critical patent/JPS604905U/ja
Application granted granted Critical
Publication of JPH0325123Y2 publication Critical patent/JPH0325123Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9723383U 1983-06-23 1983-06-23 膜厚モニタ装置 Granted JPS604905U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9723383U JPS604905U (ja) 1983-06-23 1983-06-23 膜厚モニタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9723383U JPS604905U (ja) 1983-06-23 1983-06-23 膜厚モニタ装置

Publications (2)

Publication Number Publication Date
JPS604905U true JPS604905U (ja) 1985-01-14
JPH0325123Y2 JPH0325123Y2 (enrdf_load_stackoverflow) 1991-05-31

Family

ID=30231377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9723383U Granted JPS604905U (ja) 1983-06-23 1983-06-23 膜厚モニタ装置

Country Status (1)

Country Link
JP (1) JPS604905U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0325123Y2 (enrdf_load_stackoverflow) 1991-05-31

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