JPS6312535B2 - - Google Patents
Info
- Publication number
- JPS6312535B2 JPS6312535B2 JP12693382A JP12693382A JPS6312535B2 JP S6312535 B2 JPS6312535 B2 JP S6312535B2 JP 12693382 A JP12693382 A JP 12693382A JP 12693382 A JP12693382 A JP 12693382A JP S6312535 B2 JPS6312535 B2 JP S6312535B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- reflectance
- light
- plane
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 14
- 239000010408 film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12693382A JPS5917139A (ja) | 1982-07-20 | 1982-07-20 | 反射率測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12693382A JPS5917139A (ja) | 1982-07-20 | 1982-07-20 | 反射率測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5917139A JPS5917139A (ja) | 1984-01-28 |
| JPS6312535B2 true JPS6312535B2 (enrdf_load_stackoverflow) | 1988-03-19 |
Family
ID=14947487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12693382A Granted JPS5917139A (ja) | 1982-07-20 | 1982-07-20 | 反射率測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5917139A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10297565T5 (de) * | 2001-12-17 | 2005-01-05 | Cyberoptics Semiconductor, Inc., Beaverton | Mapping-Sensor für Halbleiterwaferträger |
-
1982
- 1982-07-20 JP JP12693382A patent/JPS5917139A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5917139A (ja) | 1984-01-28 |
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