JPH0322913Y2 - - Google Patents

Info

Publication number
JPH0322913Y2
JPH0322913Y2 JP1983135015U JP13501583U JPH0322913Y2 JP H0322913 Y2 JPH0322913 Y2 JP H0322913Y2 JP 1983135015 U JP1983135015 U JP 1983135015U JP 13501583 U JP13501583 U JP 13501583U JP H0322913 Y2 JPH0322913 Y2 JP H0322913Y2
Authority
JP
Japan
Prior art keywords
growth solution
mercury
liquid phase
substrate
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983135015U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6042734U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13501583U priority Critical patent/JPS6042734U/ja
Publication of JPS6042734U publication Critical patent/JPS6042734U/ja
Application granted granted Critical
Publication of JPH0322913Y2 publication Critical patent/JPH0322913Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13501583U 1983-08-31 1983-08-31 液相エピタキシャル成長装置 Granted JPS6042734U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13501583U JPS6042734U (ja) 1983-08-31 1983-08-31 液相エピタキシャル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13501583U JPS6042734U (ja) 1983-08-31 1983-08-31 液相エピタキシャル成長装置

Publications (2)

Publication Number Publication Date
JPS6042734U JPS6042734U (ja) 1985-03-26
JPH0322913Y2 true JPH0322913Y2 (enrdf_load_html_response) 1991-05-20

Family

ID=30304031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13501583U Granted JPS6042734U (ja) 1983-08-31 1983-08-31 液相エピタキシャル成長装置

Country Status (1)

Country Link
JP (1) JPS6042734U (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937880A (enrdf_load_html_response) * 1972-08-11 1974-04-08
JPS617253Y2 (enrdf_load_html_response) * 1980-11-20 1986-03-05

Also Published As

Publication number Publication date
JPS6042734U (ja) 1985-03-26

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