JPH0322912Y2 - - Google Patents
Info
- Publication number
- JPH0322912Y2 JPH0322912Y2 JP6663086U JP6663086U JPH0322912Y2 JP H0322912 Y2 JPH0322912 Y2 JP H0322912Y2 JP 6663086 U JP6663086 U JP 6663086U JP 6663086 U JP6663086 U JP 6663086U JP H0322912 Y2 JPH0322912 Y2 JP H0322912Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- lid
- semiconductor manufacturing
- insulating film
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6663086U JPH0322912Y2 (enrdf_load_stackoverflow) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6663086U JPH0322912Y2 (enrdf_load_stackoverflow) | 1986-04-30 | 1986-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62178531U JPS62178531U (enrdf_load_stackoverflow) | 1987-11-12 |
| JPH0322912Y2 true JPH0322912Y2 (enrdf_load_stackoverflow) | 1991-05-20 |
Family
ID=30904815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6663086U Expired JPH0322912Y2 (enrdf_load_stackoverflow) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322912Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-04-30 JP JP6663086U patent/JPH0322912Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62178531U (enrdf_load_stackoverflow) | 1987-11-12 |
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