JPH0322911Y2 - - Google Patents

Info

Publication number
JPH0322911Y2
JPH0322911Y2 JP1985057221U JP5722185U JPH0322911Y2 JP H0322911 Y2 JPH0322911 Y2 JP H0322911Y2 JP 1985057221 U JP1985057221 U JP 1985057221U JP 5722185 U JP5722185 U JP 5722185U JP H0322911 Y2 JPH0322911 Y2 JP H0322911Y2
Authority
JP
Japan
Prior art keywords
susceptor
etching
insulating film
wafer
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985057221U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61173133U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057221U priority Critical patent/JPH0322911Y2/ja
Publication of JPS61173133U publication Critical patent/JPS61173133U/ja
Application granted granted Critical
Publication of JPH0322911Y2 publication Critical patent/JPH0322911Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1985057221U 1985-04-16 1985-04-16 Expired JPH0322911Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057221U JPH0322911Y2 (enExample) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057221U JPH0322911Y2 (enExample) 1985-04-16 1985-04-16

Publications (2)

Publication Number Publication Date
JPS61173133U JPS61173133U (enExample) 1986-10-28
JPH0322911Y2 true JPH0322911Y2 (enExample) 1991-05-20

Family

ID=30581547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057221U Expired JPH0322911Y2 (enExample) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPH0322911Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus
JPS5834913A (ja) * 1981-08-27 1983-03-01 Mitsubishi Electric Corp ウエ−ハ支持具の清浄化方法

Also Published As

Publication number Publication date
JPS61173133U (enExample) 1986-10-28

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