JPH0322908Y2 - - Google Patents

Info

Publication number
JPH0322908Y2
JPH0322908Y2 JP1987062677U JP6267787U JPH0322908Y2 JP H0322908 Y2 JPH0322908 Y2 JP H0322908Y2 JP 1987062677 U JP1987062677 U JP 1987062677U JP 6267787 U JP6267787 U JP 6267787U JP H0322908 Y2 JPH0322908 Y2 JP H0322908Y2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
support boat
heat
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987062677U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63170951U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987062677U priority Critical patent/JPH0322908Y2/ja
Publication of JPS63170951U publication Critical patent/JPS63170951U/ja
Application granted granted Critical
Publication of JPH0322908Y2 publication Critical patent/JPH0322908Y2/ja
Expired legal-status Critical Current

Links

JP1987062677U 1987-04-27 1987-04-27 Expired JPH0322908Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987062677U JPH0322908Y2 (enrdf_load_html_response) 1987-04-27 1987-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987062677U JPH0322908Y2 (enrdf_load_html_response) 1987-04-27 1987-04-27

Publications (2)

Publication Number Publication Date
JPS63170951U JPS63170951U (enrdf_load_html_response) 1988-11-07
JPH0322908Y2 true JPH0322908Y2 (enrdf_load_html_response) 1991-05-20

Family

ID=30897176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987062677U Expired JPH0322908Y2 (enrdf_load_html_response) 1987-04-27 1987-04-27

Country Status (1)

Country Link
JP (1) JPH0322908Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62109444U (enrdf_load_html_response) * 1985-12-26 1987-07-13

Also Published As

Publication number Publication date
JPS63170951U (enrdf_load_html_response) 1988-11-07

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