JPH0322755B2 - - Google Patents
Info
- Publication number
- JPH0322755B2 JPH0322755B2 JP56149168A JP14916881A JPH0322755B2 JP H0322755 B2 JPH0322755 B2 JP H0322755B2 JP 56149168 A JP56149168 A JP 56149168A JP 14916881 A JP14916881 A JP 14916881A JP H0322755 B2 JPH0322755 B2 JP H0322755B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- conductivity type
- substrate
- layer
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 32
- 238000003860 storage Methods 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 15
- 230000004888 barrier function Effects 0.000 claims description 14
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 238000009825 accumulation Methods 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 23
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56149168A JPS5850874A (ja) | 1981-09-21 | 1981-09-21 | 固体撮像装置およびその駆動法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56149168A JPS5850874A (ja) | 1981-09-21 | 1981-09-21 | 固体撮像装置およびその駆動法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5850874A JPS5850874A (ja) | 1983-03-25 |
| JPH0322755B2 true JPH0322755B2 (fr) | 1991-03-27 |
Family
ID=15469277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56149168A Granted JPS5850874A (ja) | 1981-09-21 | 1981-09-21 | 固体撮像装置およびその駆動法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5850874A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4525235B2 (ja) * | 2004-08-09 | 2010-08-18 | セイコーエプソン株式会社 | 固体撮像装置及びその駆動方法 |
| JP4389720B2 (ja) | 2004-08-09 | 2009-12-24 | セイコーエプソン株式会社 | 固体撮像装置および固体撮像装置の駆動方法 |
| JP4389737B2 (ja) | 2004-09-22 | 2009-12-24 | セイコーエプソン株式会社 | 固体撮像装置及びその駆動方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54124480U (fr) * | 1978-02-20 | 1979-08-31 |
-
1981
- 1981-09-21 JP JP56149168A patent/JPS5850874A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5850874A (ja) | 1983-03-25 |
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