JPH0321970B2 - - Google Patents

Info

Publication number
JPH0321970B2
JPH0321970B2 JP58174528A JP17452883A JPH0321970B2 JP H0321970 B2 JPH0321970 B2 JP H0321970B2 JP 58174528 A JP58174528 A JP 58174528A JP 17452883 A JP17452883 A JP 17452883A JP H0321970 B2 JPH0321970 B2 JP H0321970B2
Authority
JP
Japan
Prior art keywords
target
space
tape
roller
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58174528A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6066330A (ja
Inventor
Minoru Kume
Juzo Abe
Akio Takeoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP17452883A priority Critical patent/JPS6066330A/ja
Publication of JPS6066330A publication Critical patent/JPS6066330A/ja
Publication of JPH0321970B2 publication Critical patent/JPH0321970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP17452883A 1983-09-20 1983-09-20 テ−プ状媒体の製造方法 Granted JPS6066330A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17452883A JPS6066330A (ja) 1983-09-20 1983-09-20 テ−プ状媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17452883A JPS6066330A (ja) 1983-09-20 1983-09-20 テ−プ状媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS6066330A JPS6066330A (ja) 1985-04-16
JPH0321970B2 true JPH0321970B2 (enrdf_load_stackoverflow) 1991-03-25

Family

ID=15980100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17452883A Granted JPS6066330A (ja) 1983-09-20 1983-09-20 テ−プ状媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS6066330A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4798550B2 (ja) * 2007-03-07 2011-10-19 凸版印刷株式会社 スパッタリング装置及び透明導電膜形成方法並びに有機電界発光素子の製造方法
DE102013206210B4 (de) * 2013-04-09 2017-05-04 Von Ardenne Gmbh Vakuumbeschichtungsvorrichtung und Verfahren zur Mehrfachbeschichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423507A (en) * 1977-07-22 1979-02-22 Matsushita Electric Ind Co Ltd Producing apparatus of magnetic recording media
JPS57100627A (en) * 1980-12-12 1982-06-22 Teijin Ltd Manufacture of vertical magnetic recording medium

Also Published As

Publication number Publication date
JPS6066330A (ja) 1985-04-16

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