JPH0321970B2 - - Google Patents
Info
- Publication number
- JPH0321970B2 JPH0321970B2 JP58174528A JP17452883A JPH0321970B2 JP H0321970 B2 JPH0321970 B2 JP H0321970B2 JP 58174528 A JP58174528 A JP 58174528A JP 17452883 A JP17452883 A JP 17452883A JP H0321970 B2 JPH0321970 B2 JP H0321970B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- space
- tape
- roller
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】
(イ) 産業上の利用分野
本発明はVTR等に使用する磁気テープ等のテ
ープ状媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method for manufacturing tape-shaped media such as magnetic tapes used in VTRs and the like.
(ロ) 従来技術
VTRの稠密記録傾向に対応して磁性層を蒸着
法、スパツタリング法等で付設する磁気テープが
提案されている。これらの方法でテープ状基台の
両面の面内方向に磁気異方性を持たせようとする
場合、キヤンローラによつて移送されるテープ状
基台に対して斜め方向から磁性粒子を付設させる
ようにしているので、第１図に示す如く、独立に
動作する２つの蒸発源Ａ，Ｂを使つて基台Ｃの両
面C1，C2に付設する必要がある。これは実質的
に２つの付着装置を備えることと同じであり、装
置の有効利用の観点で劣る。そのため、特別の要
請がない限り、基台の片面にのみ磁性層を形成す
るタイプが主流を占めている。しかし、この場
合、薄膜（磁性層）の内部応力や基台の熱変形に
よつてカーリングを生じる傾向がある。このカー
リングは基台の反対側にダミーの薄膜を形成する
ことによつて除去できることが知られているが、
そのために別途、薄膜付設工程を付加することは
生産性の面で好ましくない。(b) Prior Art In response to the tendency for dense recording in VTRs, magnetic tapes have been proposed in which a magnetic layer is attached by vapor deposition, sputtering, or the like. When trying to create magnetic anisotropy in the in-plane direction on both sides of a tape-shaped base using these methods, it is necessary to attach magnetic particles from an oblique direction to the tape-shaped base transferred by a can roller. Therefore, as shown in FIG. 1, it is necessary to use two evaporation sources A and B that operate independently and to attach them to both sides C 1 and C 2 of the base C. This is essentially the same as having two attachment devices, which is inferior in terms of effective utilization of the device. Therefore, unless there is a special request, the mainstream type is a type in which a magnetic layer is formed only on one side of the base. However, in this case, curling tends to occur due to internal stress in the thin film (magnetic layer) and thermal deformation of the base. It is known that this curling can be removed by forming a dummy thin film on the opposite side of the base.
For this reason, it is not preferable to add a separate process for attaching a thin film in terms of productivity.
(ハ) 発明の目的
本発明は以上の点に鑑みなされたもので、１つ
の蒸発源を使つて基台の両面に実質的に均等な薄
膜を付設することのできるテープ状媒体の製造方
法を提供しようとするものである。(c) Purpose of the Invention The present invention has been made in view of the above points, and provides a method for manufacturing a tape-shaped medium that can apply a substantially uniform thin film to both sides of a base using one evaporation source. This is what we are trying to provide.
(ニ) 発明の構成
本発明は対向ターゲツトを持つスパツタ装置に
２つのキヤンローラを対向させ、これらキヤンロ
ーラに案内されるテープ状媒体の両面に薄膜を実
質的に同一条件で付設することを特徴とするもの
である。そのため、対向ターゲツト間の空間に隣
接して、該空間にキヤンローラが対面する領域を
制限する窓を持つシールドを配備し、また、対向
ターゲツトに対する両キヤンローラの位置関係を
対称にしている。そして、好ましい態様では、キ
ヤンローラの回転面を対向ターゲツトの面と平行
に配備してテープ状媒体の幅方向における薄膜成
形条件を大巾に変えないようにする。(d) Structure of the Invention The present invention is characterized in that two can rollers are arranged to face each other in a sputtering device having opposing targets, and a thin film is applied under substantially the same conditions to both sides of a tape-shaped medium guided by these can rollers. It is something. Therefore, a shield having a window is provided adjacent to the space between the opposing targets to limit the area where the can roller faces the space, and the positional relationship of both the can rollers with respect to the opposing target is made symmetrical. In a preferred embodiment, the rotating surface of the can roller is arranged parallel to the surface of the opposing target, so that the thin film forming conditions in the width direction of the tape-like medium are not changed significantly.
(ホ) 実施例
第２図は本発明方法に使用される装置の模型図
を示すものである。装置Ｓは対向ターゲツト式蒸
着装置であり、装置Ｔはテープ移送装置である。(E) Example FIG. 2 shows a model diagram of an apparatus used in the method of the present invention. Apparatus S is a facing target deposition apparatus and apparatus T is a tape transport apparatus.
対向ターゲツト式蒸着装置Ｓは通常のスパツタ
装置と同様、真空容器１と、真空容器を排気する
真空ポンプ等を含む排気系２と、真空容器内に所
定のガスを導入して真空容器内の圧力を所定のガ
ス圧力に設定するガス導入系３を備えている。 The facing target vapor deposition apparatus S is similar to a normal sputtering apparatus, and includes a vacuum vessel 1, an exhaust system 2 including a vacuum pump for evacuating the vacuum vessel, and a predetermined gas introduced into the vacuum vessel to increase the pressure inside the vacuum vessel. A gas introduction system 3 is provided for setting the gas pressure to a predetermined gas pressure.
ターゲツト４，５はターゲツト面４ａ，５ａが
互に対向するように離間して配置されており、各
ターゲツトの背面側にはターゲツト面に直交する
方向に１方向磁界を発生させるように永久磁石
６，７が図示の極性で配備されている。各ターゲ
ツト４，５には電源８からの負電位がブラケツト
９，９を通じて付与され、正電位が付与された真
空容器１との間で放電を発生しうるようにしてい
る。ブラケツト９，９は何れも絶縁部材１０，１
０で真空容器１から絶縁されている。尚、ターゲ
ツト４，５はCo−Pt合金である。 The targets 4 and 5 are spaced apart so that the target surfaces 4a and 5a face each other, and a permanent magnet 6 is installed on the back side of each target to generate a unidirectional magnetic field in a direction perpendicular to the target surface. , 7 are arranged with the polarities shown. A negative potential from a power source 8 is applied to each target 4, 5 through brackets 9, 9 so that a discharge can be generated between the targets 4 and 5 and the vacuum vessel 1 to which a positive potential is applied. The brackets 9, 9 are both insulating members 10, 1
0 and is insulated from the vacuum vessel 1. Note that the targets 4 and 5 are Co--Pt alloys.
シールド１１はスパツタリング時におけるプラ
ズマ粒子の拡散方向を制限するもので、シールド
１１上の窓１１ａ，１１ｂは後述の基板に対向し
て配備され、ブラケツト９，９及び絶縁部材１
０，１０をプラズマ粒子の付着から保護してお
り、またターゲツト表面以外の部分での異常放電
を防止するようにしている。 The shield 11 restricts the diffusion direction of plasma particles during sputtering, and windows 11a and 11b on the shield 11 are arranged facing the substrate, which will be described later, and the brackets 9 and the insulating member 1
0 and 10 from adhesion of plasma particles, and also prevents abnormal discharge in areas other than the target surface.
テープ移送装置Ｔは供給リール２０と、第１の
キヤンローラ２１と、案内ローラ２２，２３，２
４と、第２のキヤンローラ２５と、巻取リール２
６とを備えており、テープ状媒体２７は供給リー
ル２０から巻取リール２６に向けて一定速度で移
送されている。第１のキヤンローラ２１は軸２１
ａを中心に時計方向に回転し、これに周接する媒
体２７の１面をシールド１１の窓１１ａに対面さ
せるようにしている。同様に、第２のキヤンロー
ラ２５は軸２５ａを中心に反時計方向に回転し、
これに周接する媒体２７の他面をシールド１１の
窓１１ｂに対面させるようにしている。両キヤン
ローラ２１，２５の軸はターゲツト４，５から等
距離（d1＝d2）に配設されている。本実施例では
各キヤンローラ２１，２５の回転平面をターゲツ
ト４，５のターゲツト面４ａ，５ａと直交する関
係に配置しているが、第３図に示すように両面を
平行に配置するようにしても良い。ターゲツト４
の形状が円板状である場合、前者では第４図に示
す如く媒体２７の巾方向２８におけるターゲツト
４との位置関係がd1＜d2と相違するため傾向とし
て媒体の中央部で膜厚が大きく両側で薄くなる
が、後者の場合には巾方向におけるターゲツトと
の関係が均等であるので原理上均一な膜厚を得る
ことができる。 The tape transport device T includes a supply reel 20, a first can roller 21, and guide rollers 22, 23, 2.
4, the second can roller 25, and the take-up reel 2
6, and the tape-shaped medium 27 is transported from the supply reel 20 to the take-up reel 26 at a constant speed. The first can roller 21 is a shaft 21
The medium 27 is rotated clockwise around point a so that one surface of the medium 27 surrounding the medium 27 faces the window 11a of the shield 11. Similarly, the second can roller 25 rotates counterclockwise around the shaft 25a,
The other surface of the medium 27 surrounding this is made to face the window 11b of the shield 11. The axes of both can rollers 21 and 25 are arranged at the same distance from the targets 4 and 5 (d 1 =d 2 ). In this embodiment, the rotation planes of the can rollers 21 and 25 are arranged perpendicularly to the target surfaces 4a and 5a of the targets 4 and 5, but as shown in FIG. 3, both surfaces are arranged parallel to each other. Also good. Target 4
When the shape of the medium is a disk, in the former case, as shown in FIG. 4, the film thickness tends to decrease at the center of the medium because the positional relationship with the target 4 in the width direction 28 of the medium 27 is different from d 1 < d 2 . is large and thinner on both sides, but in the latter case, since the relationship with the target in the width direction is equal, a uniform film thickness can be obtained in principle.
(ヘ) 発明の効果
本発明は１つの蒸着源を使つて媒体の両面に膜
を略同じ条件で付着させるものであるから蒸着源
を効率よく利用でき両面に磁性層を持つ媒体を格
安に提供できる。又、媒体の両面に磁性層をほぼ
同じ条件で付着せしめるのでカール現象を防ぐこ
とができその防止手段を別途構ずる必要がない。(F) Effects of the Invention Since the present invention uses one vapor deposition source to deposit films on both sides of a medium under substantially the same conditions, the vapor deposition source can be used efficiently and a medium having magnetic layers on both sides can be provided at a low cost. can. Furthermore, since the magnetic layers are deposited on both sides of the medium under substantially the same conditions, curling can be prevented and there is no need to provide a separate means for preventing it.
第１図は膜を両面に付着する従来装置の原理
図、第２図は本発明方法に使用される装置の構成
図、第３図は同装置の他の実施例の構成図、第４
図は膜の付設状態の説明図である。
主な図番の説明、４，５……ターゲツト、１１
……シールド、１１ａ，１１ｂ……シールドの
窓、２１，２５……第１、第２のキヤンローラ、
２７……媒体。
Fig. 1 is a principle diagram of a conventional apparatus for attaching a film to both sides, Fig. 2 is a block diagram of the apparatus used in the method of the present invention, Fig. 3 is a block diagram of another embodiment of the same apparatus, and Fig. 4 is a block diagram of the apparatus used in the method of the present invention.
The figure is an explanatory diagram of the attached state of the membrane. Explanation of main drawing numbers, 4, 5...Target, 11
...Shield, 11a, 11b...Shield window, 21, 25...First and second can rollers,
27...Medium.
Claims (1)
ように１対のターゲツトからなる対向ターゲツト
を配備すると共に該空間の前記ターゲツト面間に
直流磁界を付与する装置を配備し、さらに該空間
を囲んで該空間に対向する領域を制限する窓を持
つシールドを配備して、前記窓を通して周面が前
記空間の中央部分に対面するように前記空間の周
りに配備された第１、第２キヤンローラに、第１
キヤンローラ側では第１面がそして第２キヤンロ
ーラ側では前記第１面とは反対側の第２面がそれ
ぞれ前記空間に対面するように案内されるテープ
状媒体の両面上に、前記対向ターゲツトのスパツ
タにより薄膜を形成することを特徴とするテープ
状媒体の製造方法。 ２ 前記ターゲツトは円板状であり、又前記両キ
ヤンローラはその回転面が該ターゲツトのターゲ
ツト面に平行でありかつ前記対向ターゲツトから
等距離に配備されていることを特徴とする特許請
求の範囲第１項記載のテープ状媒体の製造方法。[Scope of Claims] 1. A pair of opposing targets are provided so that the target surfaces are parallel to each other across a space, and a device is provided that applies a DC magnetic field between the target surfaces in the space, Further, a shield having a window surrounding the space and limiting an area facing the space is provided, and a first shield is provided around the space such that a peripheral surface faces a central portion of the space through the window. , to the second can roller, to the first
The spatter of the opposing target is placed on both sides of a tape-shaped medium that is guided such that a first surface faces the space on the side of the can roller, and a second surface opposite to the first surface faces the space on the side of the second can roller. 1. A method for manufacturing a tape-shaped medium, comprising forming a thin film by. 2. The target is disk-shaped, and both of the can rollers have rotational surfaces parallel to the target surface of the target and are disposed equidistant from the opposing target. A method for producing a tape-shaped medium according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17452883A JPS6066330A (en) | 1983-09-20 | 1983-09-20 | Production of tape-like medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17452883A JPS6066330A (en) | 1983-09-20 | 1983-09-20 | Production of tape-like medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6066330A JPS6066330A (en) | 1985-04-16 |
| JPH0321970B2 true JPH0321970B2 (en) | 1991-03-25 |
Family
ID=15980100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17452883A Granted JPS6066330A (en) | 1983-09-20 | 1983-09-20 | Production of tape-like medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6066330A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4798550B2 (en) * | 2007-03-07 | 2011-10-19 | 凸版印刷株式会社 | Sputtering apparatus, transparent conductive film forming method, and organic electroluminescent element manufacturing method |
| DE102013206210B4 (en) * | 2013-04-09 | 2017-05-04 | Von Ardenne Gmbh | Vacuum coating apparatus and method for multiple coating |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423507A (en) * | 1977-07-22 | 1979-02-22 | Matsushita Electric Ind Co Ltd | Producing apparatus of magnetic recording media |
| JPS57100627A (en) * | 1980-12-12 | 1982-06-22 | Teijin Ltd | Manufacture of vertical magnetic recording medium |
-
1983
- 1983-09-20 JP JP17452883A patent/JPS6066330A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423507A (en) * | 1977-07-22 | 1979-02-22 | Matsushita Electric Ind Co Ltd | Producing apparatus of magnetic recording media |
| JPS57100627A (en) * | 1980-12-12 | 1982-06-22 | Teijin Ltd | Manufacture of vertical magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6066330A (en) | 1985-04-16 |
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