JPH03183626A - 合成石英ガラスルツボ用原料の製造方法 - Google Patents

合成石英ガラスルツボ用原料の製造方法

Info

Publication number
JPH03183626A
JPH03183626A JP32225289A JP32225289A JPH03183626A JP H03183626 A JPH03183626 A JP H03183626A JP 32225289 A JP32225289 A JP 32225289A JP 32225289 A JP32225289 A JP 32225289A JP H03183626 A JPH03183626 A JP H03183626A
Authority
JP
Japan
Prior art keywords
quartz glass
ingot
synthetic quartz
particle size
flotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32225289A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563416B2 (enrdf_load_stackoverflow
Inventor
Masatoshi Takita
滝田　政俊
Takaaki Shimizu
孝明 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP32225289A priority Critical patent/JPH03183626A/ja
Publication of JPH03183626A publication Critical patent/JPH03183626A/ja
Publication of JPH0563416B2 publication Critical patent/JPH0563416B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
JP32225289A 1989-12-12 1989-12-12 合成石英ガラスルツボ用原料の製造方法 Granted JPH03183626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32225289A JPH03183626A (ja) 1989-12-12 1989-12-12 合成石英ガラスルツボ用原料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32225289A JPH03183626A (ja) 1989-12-12 1989-12-12 合成石英ガラスルツボ用原料の製造方法

Publications (2)

Publication Number Publication Date
JPH03183626A true JPH03183626A (ja) 1991-08-09
JPH0563416B2 JPH0563416B2 (enrdf_load_stackoverflow) 1993-09-10

Family

ID=18141590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32225289A Granted JPH03183626A (ja) 1989-12-12 1989-12-12 合成石英ガラスルツボ用原料の製造方法

Country Status (1)

Country Link
JP (1) JPH03183626A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0803469A4 (enrdf_load_stackoverflow) * 1995-01-12 1997-11-19
JP2002080230A (ja) * 2000-06-28 2002-03-19 Mitsubishi Material Quartz Kk 合成石英粉とその製造方法および合成石英ルツボ
JP2017061413A (ja) * 2016-12-28 2017-03-30 株式会社Sumco シリコン単結晶引き上げ用のシリカガラスルツボの製造方法、シリコン単結晶の製造方法およびシリコン単結晶

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0803469A4 (enrdf_load_stackoverflow) * 1995-01-12 1997-11-19
US6071838A (en) * 1995-01-12 2000-06-06 Mitsubishi Chemical Corporation Silica gel, synthetic quartz glass powder, quartz glass shaped product molding, and processes for producing these
JP2002080230A (ja) * 2000-06-28 2002-03-19 Mitsubishi Material Quartz Kk 合成石英粉とその製造方法および合成石英ルツボ
JP2017061413A (ja) * 2016-12-28 2017-03-30 株式会社Sumco シリコン単結晶引き上げ用のシリカガラスルツボの製造方法、シリコン単結晶の製造方法およびシリコン単結晶

Also Published As

Publication number Publication date
JPH0563416B2 (enrdf_load_stackoverflow) 1993-09-10

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