JPH0317217B2 - - Google Patents

Info

Publication number
JPH0317217B2
JPH0317217B2 JP58157966A JP15796683A JPH0317217B2 JP H0317217 B2 JPH0317217 B2 JP H0317217B2 JP 58157966 A JP58157966 A JP 58157966A JP 15796683 A JP15796683 A JP 15796683A JP H0317217 B2 JPH0317217 B2 JP H0317217B2
Authority
JP
Japan
Prior art keywords
light
light source
infrared
polarizing plate
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58157966A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050935A (ja
Inventor
Tooru Katsumata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58157966A priority Critical patent/JPS6050935A/ja
Publication of JPS6050935A publication Critical patent/JPS6050935A/ja
Publication of JPH0317217B2 publication Critical patent/JPH0317217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP58157966A 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置 Granted JPS6050935A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58157966A JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58157966A JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Publications (2)

Publication Number Publication Date
JPS6050935A JPS6050935A (ja) 1985-03-22
JPH0317217B2 true JPH0317217B2 (enExample) 1991-03-07

Family

ID=15661332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58157966A Granted JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Country Status (1)

Country Link
JP (1) JPS6050935A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2739943B2 (ja) * 1987-11-06 1998-04-15 株式会社東芝 接合型半導体基板の検査方法および装置
JPH01263540A (ja) * 1988-04-15 1989-10-20 Hitachi Ltd パターン検出装置
GB2560299B (en) 2017-02-01 2021-07-07 Nicoventures Trading Ltd Heating element and method of analysing
GB201701633D0 (en) 2017-02-01 2017-03-15 Nicoventures Holdings Ltd Heating element selection method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149586A (en) * 1978-05-17 1979-11-22 Hitachi Ltd Mask aligner
JPS5632116A (en) * 1979-08-23 1981-04-01 Toshiba Corp Specimen observing device

Also Published As

Publication number Publication date
JPS6050935A (ja) 1985-03-22

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