JPS6050935A - ガリウム砒素ウェーハ検査装置 - Google Patents

ガリウム砒素ウェーハ検査装置

Info

Publication number
JPS6050935A
JPS6050935A JP58157966A JP15796683A JPS6050935A JP S6050935 A JPS6050935 A JP S6050935A JP 58157966 A JP58157966 A JP 58157966A JP 15796683 A JP15796683 A JP 15796683A JP S6050935 A JPS6050935 A JP S6050935A
Authority
JP
Japan
Prior art keywords
light
polarizing plate
plate
measurement
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58157966A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317217B2 (enExample
Inventor
Toru Katsumata
徹 勝亦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58157966A priority Critical patent/JPS6050935A/ja
Publication of JPS6050935A publication Critical patent/JPS6050935A/ja
Publication of JPH0317217B2 publication Critical patent/JPH0317217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP58157966A 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置 Granted JPS6050935A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58157966A JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58157966A JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Publications (2)

Publication Number Publication Date
JPS6050935A true JPS6050935A (ja) 1985-03-22
JPH0317217B2 JPH0317217B2 (enExample) 1991-03-07

Family

ID=15661332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58157966A Granted JPS6050935A (ja) 1983-08-31 1983-08-31 ガリウム砒素ウェーハ検査装置

Country Status (1)

Country Link
JP (1) JPS6050935A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01122133A (ja) * 1987-11-06 1989-05-15 Toshiba Corp 接合型半導体基板の検査方法
JPH01263540A (ja) * 1988-04-15 1989-10-20 Hitachi Ltd パターン検出装置
US11805574B2 (en) 2017-02-01 2023-10-31 Nicoventures Trading Limited Heating element selection method
US11818812B2 (en) 2017-02-01 2023-11-14 Nicoventures Trading Limited Heating element and method of analyzing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149586A (en) * 1978-05-17 1979-11-22 Hitachi Ltd Mask aligner
JPS5632116A (en) * 1979-08-23 1981-04-01 Toshiba Corp Specimen observing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149586A (en) * 1978-05-17 1979-11-22 Hitachi Ltd Mask aligner
JPS5632116A (en) * 1979-08-23 1981-04-01 Toshiba Corp Specimen observing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01122133A (ja) * 1987-11-06 1989-05-15 Toshiba Corp 接合型半導体基板の検査方法
JPH01263540A (ja) * 1988-04-15 1989-10-20 Hitachi Ltd パターン検出装置
US11805574B2 (en) 2017-02-01 2023-10-31 Nicoventures Trading Limited Heating element selection method
US11818812B2 (en) 2017-02-01 2023-11-14 Nicoventures Trading Limited Heating element and method of analyzing

Also Published As

Publication number Publication date
JPH0317217B2 (enExample) 1991-03-07

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