JPH0316152U - - Google Patents
Info
- Publication number
- JPH0316152U JPH0316152U JP7559989U JP7559989U JPH0316152U JP H0316152 U JPH0316152 U JP H0316152U JP 7559989 U JP7559989 U JP 7559989U JP 7559989 U JP7559989 U JP 7559989U JP H0316152 U JPH0316152 U JP H0316152U
- Authority
- JP
- Japan
- Prior art keywords
- pattern portion
- circuit pattern
- contact exposure
- manufacture
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Description
第１図は本考案マスクの要部平面図、第２図及
び第３図は従来例を示すもので、第２図は密着露
光の説明図、第３図はレジスト付マスクブランク
スの断面図である。
１ａ……ガラス層、１ｂ……回路パターン部、
５……密着露光用マスク、５ａ……ダミーパター
ン部。
Figure 1 is a plan view of the main parts of the mask of the present invention, Figures 2 and 3 show conventional examples, Figure 2 is an explanatory diagram of contact exposure, and Figure 3 is a cross-sectional view of a mask blank with resist. be. 1a...Glass layer, 1b...Circuit pattern section,
5...Mask for contact exposure, 5a...Dummy pattern section.
Claims (1)
を有する密着露光用マスクにおいて、 上記回路パターン部を除く部分にダミーパター
ン部を形成したことを特徴とする密着露光用マス
ク。[Claims for Utility Model Registration] A contact exposure mask used in the manufacture of semiconductor devices and having a circuit pattern portion, characterized in that a dummy pattern portion is formed in a portion other than the circuit pattern portion. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7559989U JPH0316152U (en) | 1989-06-29 | 1989-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7559989U JPH0316152U (en) | 1989-06-29 | 1989-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316152U true JPH0316152U (en) | 1991-02-18 |
Family
ID=31616311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7559989U Pending JPH0316152U (en) | 1989-06-29 | 1989-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316152U (en) |
-
1989
- 1989-06-29 JP JP7559989U patent/JPH0316152U/ja active Pending