JPS6449842U - - Google Patents
Info
- Publication number
- JPS6449842U JPS6449842U JP1987143491U JP14349187U JPS6449842U JP S6449842 U JPS6449842 U JP S6449842U JP 1987143491 U JP1987143491 U JP 1987143491U JP 14349187 U JP14349187 U JP 14349187U JP S6449842 U JPS6449842 U JP S6449842U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- dimensions
- resist pattern
- mask pattern
- pattern corresponding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Description
第１図は本案品の平面図、第２図は従来品の平
面図である。
１……フオトマスク。
FIG. 1 is a plan view of the proposed product, and FIG. 2 is a plan view of the conventional product. 1...Photomask.
Claims (1)
べきレジストパターンに対応するマスクパターン
を有するフオトマスクにおいて、前記ウエハの外
周部に形成すべきレジストパターンに対応するマ
スクパターンの寸法と、前記ウエハの中央部に形
成すべきレジストパターンに対応するマスクパタ
ーンの寸法とに差異を付与してあることを特徴と
するフオトマスク。 In a photomask having a mask pattern corresponding to a resist pattern to be formed on a photoresist coated on a wafer, the dimensions of the mask pattern corresponding to the resist pattern to be formed on the outer periphery of the wafer, and the dimensions of the mask pattern corresponding to the resist pattern to be formed on the outer periphery of the wafer, and A photomask characterized in that the dimensions of the mask pattern corresponding to the resist pattern to be formed are different.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143491U JPS6449842U (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987143491U JPS6449842U (en) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6449842U true JPS6449842U (en) | 1989-03-28 |
Family
ID=31410366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987143491U Pending JPS6449842U (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6449842U (en) |
-
1987
- 1987-09-18 JP JP1987143491U patent/JPS6449842U/ja active Pending