JPH0169238U - - Google Patents
Info
- Publication number
- JPH0169238U JPH0169238U JP16553187U JP16553187U JPH0169238U JP H0169238 U JPH0169238 U JP H0169238U JP 16553187 U JP16553187 U JP 16553187U JP 16553187 U JP16553187 U JP 16553187U JP H0169238 U JPH0169238 U JP H0169238U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- displayed
- semiconductor device
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は本考案の一実施例を示す平面図、第２
図は本考案の他の実施例を示す平面図である。
１……フオトマスク、２……マスクパターン、
３……管理番号、４……バーコード、５……バー
コードラベル。
Fig. 1 is a plan view showing one embodiment of the present invention;
The figure is a plan view showing another embodiment of the present invention. 1...Photomask, 2...Mask pattern,
3...Management number, 4...Barcode, 5...Barcode label.
Claims (1)
れていることを特徴とする半導体装置製造用のフ
オトマスク。 A photomask for semiconductor device manufacturing, characterized in that a necessary control number is displayed in barcode form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553187U JPH0169238U (en) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16553187U JPH0169238U (en) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0169238U true JPH0169238U (en) | 1989-05-08 |
Family
ID=31452100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16553187U Pending JPH0169238U (en) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0169238U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251298A (en) * | 1988-03-31 | 1989-10-06 | Nohmi Bosai Ltd | Fire detector |
| JP2002116533A (en) * | 2000-10-11 | 2002-04-19 | Dainippon Printing Co Ltd | Blanks for photomask with area code, photomask with area code and method for producing photomask |
| JP2009158776A (en) * | 2007-12-27 | 2009-07-16 | Nuflare Technology Inc | Drawing apparatus and drawing method |
-
1987
- 1987-10-28 JP JP16553187U patent/JPH0169238U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251298A (en) * | 1988-03-31 | 1989-10-06 | Nohmi Bosai Ltd | Fire detector |
| JP2002116533A (en) * | 2000-10-11 | 2002-04-19 | Dainippon Printing Co Ltd | Blanks for photomask with area code, photomask with area code and method for producing photomask |
| JP2009158776A (en) * | 2007-12-27 | 2009-07-16 | Nuflare Technology Inc | Drawing apparatus and drawing method |
| US8653487B2 (en) | 2007-12-27 | 2014-02-18 | Nuflare Technology, Inc. | Lithography apparatus and lithography method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0169238U (en) | ||
| JPS62199940U (en) | ||
| JPH01130150U (en) | ||
| JPH0435141U (en) | ||
| JPS63140525U (en) | ||
| JPH01125440U (en) | ||
| JPH0334231U (en) | ||
| JPS6219742U (en) | ||
| JPS6336033U (en) | ||
| JPS6320438U (en) | ||
| JPS62204324U (en) | ||
| JPS6445841U (en) | ||
| JPS62168642U (en) | ||
| JPH01145122U (en) | ||
| JPS63195738U (en) | ||
| JPS6372069U (en) | ||
| JPS61186231U (en) | ||
| JPS6319842U (en) | ||
| JPS6186484U (en) | ||
| JPH0256440U (en) | ||
| JPS6426831U (en) | ||
| JPH0167553U (en) | ||
| JPS63196987U (en) | ||
| JPH0381301U (en) | ||
| JPS60159436U (en) | Glass mask for semiconductor device manufacturing |