JPS62109163U - - Google Patents
Info
- Publication number
- JPS62109163U JPS62109163U JP1985199069U JP19906985U JPS62109163U JP S62109163 U JPS62109163 U JP S62109163U JP 1985199069 U JP1985199069 U JP 1985199069U JP 19906985 U JP19906985 U JP 19906985U JP S62109163 U JPS62109163 U JP S62109163U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- utility
- sides
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000059 patterning Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Description
第1図はこの考案の一実施例によるパターニン
グマスクの断面図、第2図はそのパターニングマ
スクの製造工程を順に示す断面図、第3図はその
マスクパターニングの使用状態を示す断面図、第
4図は従来のパターニングマスクの断面図、第5
図は電極基板の製造工程を順に示す断面図である
。
11…パターニングマスク、12…ベース、1
3a,13b…マスクパターン。
FIG. 1 is a sectional view of a patterning mask according to an embodiment of this invention, FIG. 2 is a sectional view showing the manufacturing process of the patterning mask in order, FIG. The figure is a cross-sectional view of a conventional patterning mask.
The figures are cross-sectional views sequentially showing the manufacturing process of the electrode substrate. 11...Patterning mask, 12...Base, 1
3a, 13b...Mask pattern.
Claims (1)
のマスクパターンを有したことを特徴とするパタ
ーニングマスク。 A patterning mask characterized by having mask patterns of mutually matching shapes on both sides of a translucent base.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985199069U JPS62109163U (en) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985199069U JPS62109163U (en) | 1985-12-26 | 1985-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62109163U true JPS62109163U (en) | 1987-07-11 |
Family
ID=31160347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985199069U Pending JPS62109163U (en) | 1985-12-26 | 1985-12-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62109163U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0293457A (en) * | 1988-09-29 | 1990-04-04 | Hoya Corp | Production of photomask |
-
1985
- 1985-12-26 JP JP1985199069U patent/JPS62109163U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0293457A (en) * | 1988-09-29 | 1990-04-04 | Hoya Corp | Production of photomask |