JPH0312788B2 - - Google Patents
Info
- Publication number
- JPH0312788B2 JPH0312788B2 JP22237983A JP22237983A JPH0312788B2 JP H0312788 B2 JPH0312788 B2 JP H0312788B2 JP 22237983 A JP22237983 A JP 22237983A JP 22237983 A JP22237983 A JP 22237983A JP H0312788 B2 JPH0312788 B2 JP H0312788B2
- Authority
- JP
- Japan
- Prior art keywords
- processing container
- graphite plate
- graphite
- vacuum
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 43
- 229910002804 graphite Inorganic materials 0.000 claims description 22
- 239000010439 graphite Substances 0.000 claims description 22
- 229910052799 carbon Inorganic materials 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 230000017525 heat dissipation Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical And Physical Treatments For Wood And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22237983A JPS60113985A (ja) | 1983-11-25 | 1983-11-25 | プリント基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22237983A JPS60113985A (ja) | 1983-11-25 | 1983-11-25 | プリント基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60113985A JPS60113985A (ja) | 1985-06-20 |
| JPH0312788B2 true JPH0312788B2 (enrdf_load_stackoverflow) | 1991-02-21 |
Family
ID=16781430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22237983A Granted JPS60113985A (ja) | 1983-11-25 | 1983-11-25 | プリント基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60113985A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638284A (ja) * | 1986-06-25 | 1988-01-14 | 松下電工株式会社 | 高熱伝導性基板 |
| EP0520243A3 (en) * | 1991-06-24 | 1993-03-10 | Siemens Aktiengesellschaft | Metal core circuit board |
| US5389400A (en) * | 1993-04-07 | 1995-02-14 | Applied Sciences, Inc. | Method for making a diamond/carbon/carbon composite useful as an integral dielectric heat sink |
-
1983
- 1983-11-25 JP JP22237983A patent/JPS60113985A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60113985A (ja) | 1985-06-20 |
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