JPH0449520B2 - - Google Patents

Info

Publication number
JPH0449520B2
JPH0449520B2 JP33013087A JP33013087A JPH0449520B2 JP H0449520 B2 JPH0449520 B2 JP H0449520B2 JP 33013087 A JP33013087 A JP 33013087A JP 33013087 A JP33013087 A JP 33013087A JP H0449520 B2 JPH0449520 B2 JP H0449520B2
Authority
JP
Japan
Prior art keywords
plasma
diamond
substrate
torch
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP33013087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01172294A (ja
Inventor
Kenichi Sasaki
Kazuaki Kurihara
Motonobu Kawarada
Nagaaki Etsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62330130A priority Critical patent/JPH01172294A/ja
Priority to EP88302836A priority patent/EP0286306B1/en
Priority to DE88302836T priority patent/DE3884653T2/de
Priority to KR1019880003737A priority patent/KR910006784B1/ko
Priority to US07/177,504 priority patent/US5368897A/en
Publication of JPH01172294A publication Critical patent/JPH01172294A/ja
Priority to US07/905,226 priority patent/US5403399A/en
Publication of JPH0449520B2 publication Critical patent/JPH0449520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP62330130A 1987-04-03 1987-12-28 ダイヤモンドの気相合成方法 Granted JPH01172294A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62330130A JPH01172294A (ja) 1987-12-28 1987-12-28 ダイヤモンドの気相合成方法
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
DE88302836T DE3884653T2 (de) 1987-04-03 1988-03-30 Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant.
KR1019880003737A KR910006784B1 (ko) 1987-04-03 1988-04-02 다이어몬드 증착장치와 방법
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62330130A JPH01172294A (ja) 1987-12-28 1987-12-28 ダイヤモンドの気相合成方法

Publications (2)

Publication Number Publication Date
JPH01172294A JPH01172294A (ja) 1989-07-07
JPH0449520B2 true JPH0449520B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=18229143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62330130A Granted JPH01172294A (ja) 1987-04-03 1987-12-28 ダイヤモンドの気相合成方法

Country Status (1)

Country Link
JP (1) JPH01172294A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200231A (en) * 1989-08-17 1993-04-06 U.S. Philips Corporation Method of manufacturing polycrystalline diamond layers
JP3203754B2 (ja) * 1992-03-30 2001-08-27 住友電気工業株式会社 ダイヤモンドの製造法および製造装置
CN102906525B (zh) 2009-12-22 2016-01-20 花王株式会社 液体的冷却方法

Also Published As

Publication number Publication date
JPH01172294A (ja) 1989-07-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees