JPH01172294A - ダイヤモンドの気相合成方法 - Google Patents

ダイヤモンドの気相合成方法

Info

Publication number
JPH01172294A
JPH01172294A JP62330130A JP33013087A JPH01172294A JP H01172294 A JPH01172294 A JP H01172294A JP 62330130 A JP62330130 A JP 62330130A JP 33013087 A JP33013087 A JP 33013087A JP H01172294 A JPH01172294 A JP H01172294A
Authority
JP
Japan
Prior art keywords
plasma
diamond
jets
vapor phase
diamond film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62330130A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449520B2 (enrdf_load_stackoverflow
Inventor
Kenichi Sasaki
謙一 佐々木
Kazuaki Kurihara
和明 栗原
Motonobu Kawarada
河原田　元信
Nagaaki Etsuno
越野　長明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62330130A priority Critical patent/JPH01172294A/ja
Priority to EP88302836A priority patent/EP0286306B1/en
Priority to DE88302836T priority patent/DE3884653T2/de
Priority to KR1019880003737A priority patent/KR910006784B1/ko
Priority to US07/177,504 priority patent/US5368897A/en
Publication of JPH01172294A publication Critical patent/JPH01172294A/ja
Priority to US07/905,226 priority patent/US5403399A/en
Publication of JPH0449520B2 publication Critical patent/JPH0449520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP62330130A 1987-04-03 1987-12-28 ダイヤモンドの気相合成方法 Granted JPH01172294A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62330130A JPH01172294A (ja) 1987-12-28 1987-12-28 ダイヤモンドの気相合成方法
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
DE88302836T DE3884653T2 (de) 1987-04-03 1988-03-30 Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant.
KR1019880003737A KR910006784B1 (ko) 1987-04-03 1988-04-02 다이어몬드 증착장치와 방법
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62330130A JPH01172294A (ja) 1987-12-28 1987-12-28 ダイヤモンドの気相合成方法

Publications (2)

Publication Number Publication Date
JPH01172294A true JPH01172294A (ja) 1989-07-07
JPH0449520B2 JPH0449520B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=18229143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62330130A Granted JPH01172294A (ja) 1987-04-03 1987-12-28 ダイヤモンドの気相合成方法

Country Status (1)

Country Link
JP (1) JPH01172294A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200231A (en) * 1989-08-17 1993-04-06 U.S. Philips Corporation Method of manufacturing polycrystalline diamond layers
US5481081A (en) * 1992-03-30 1996-01-02 Sumitomo Electric Industries, Ltd. Method and apparatus of synthesizing diamond in vapor phaase
EP3159641A1 (en) 2009-12-22 2017-04-26 Kao Corporation Method for cooling liquid

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200231A (en) * 1989-08-17 1993-04-06 U.S. Philips Corporation Method of manufacturing polycrystalline diamond layers
US5481081A (en) * 1992-03-30 1996-01-02 Sumitomo Electric Industries, Ltd. Method and apparatus of synthesizing diamond in vapor phaase
US5539176A (en) * 1992-03-30 1996-07-23 Sumitomo Electric Industries, Ltd. Method and apparatus of synthesizing diamond in vapor phase
EP3159641A1 (en) 2009-12-22 2017-04-26 Kao Corporation Method for cooling liquid

Also Published As

Publication number Publication date
JPH0449520B2 (enrdf_load_stackoverflow) 1992-08-11

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