JPH0312751Y2 - - Google Patents
Info
- Publication number
- JPH0312751Y2 JPH0312751Y2 JP18136684U JP18136684U JPH0312751Y2 JP H0312751 Y2 JPH0312751 Y2 JP H0312751Y2 JP 18136684 U JP18136684 U JP 18136684U JP 18136684 U JP18136684 U JP 18136684U JP H0312751 Y2 JPH0312751 Y2 JP H0312751Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding
- semiconductor substrate
- holding piece
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 64
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18136684U JPH0312751Y2 (US07714131-20100511-C00001.png) | 1984-11-29 | 1984-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18136684U JPH0312751Y2 (US07714131-20100511-C00001.png) | 1984-11-29 | 1984-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6195736U JPS6195736U (US07714131-20100511-C00001.png) | 1986-06-20 |
| JPH0312751Y2 true JPH0312751Y2 (US07714131-20100511-C00001.png) | 1991-03-26 |
Family
ID=30738916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18136684U Expired JPH0312751Y2 (US07714131-20100511-C00001.png) | 1984-11-29 | 1984-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312751Y2 (US07714131-20100511-C00001.png) |
-
1984
- 1984-11-29 JP JP18136684U patent/JPH0312751Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6195736U (US07714131-20100511-C00001.png) | 1986-06-20 |
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