JPH0312051Y2 - - Google Patents

Info

Publication number
JPH0312051Y2
JPH0312051Y2 JP1984130224U JP13022484U JPH0312051Y2 JP H0312051 Y2 JPH0312051 Y2 JP H0312051Y2 JP 1984130224 U JP1984130224 U JP 1984130224U JP 13022484 U JP13022484 U JP 13022484U JP H0312051 Y2 JPH0312051 Y2 JP H0312051Y2
Authority
JP
Japan
Prior art keywords
guide shaft
permanent magnet
linear
coil
electromagnetic driver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984130224U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146890U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13022484U priority Critical patent/JPS6146890U/ja
Publication of JPS6146890U publication Critical patent/JPS6146890U/ja
Application granted granted Critical
Publication of JPH0312051Y2 publication Critical patent/JPH0312051Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Moving Of Heads (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP13022484U 1984-08-28 1984-08-28 リニア送り装置 Granted JPS6146890U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13022484U JPS6146890U (ja) 1984-08-28 1984-08-28 リニア送り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13022484U JPS6146890U (ja) 1984-08-28 1984-08-28 リニア送り装置

Publications (2)

Publication Number Publication Date
JPS6146890U JPS6146890U (ja) 1986-03-28
JPH0312051Y2 true JPH0312051Y2 (enrdf_load_html_response) 1991-03-22

Family

ID=30688840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13022484U Granted JPS6146890U (ja) 1984-08-28 1984-08-28 リニア送り装置

Country Status (1)

Country Link
JP (1) JPS6146890U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1738393B1 (en) * 2004-04-05 2010-08-04 Axcelis Technologies, Inc. Drive system for scanning a workpiece with an ion beam

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4243899A (en) * 1979-03-08 1981-01-06 The Singer Company Linear motor with ring magnet and non-magnetizable end caps
JPS58108776U (ja) * 1982-01-19 1983-07-25 群馬日本電気株式会社 リニアモ−タ

Also Published As

Publication number Publication date
JPS6146890U (ja) 1986-03-28

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