JPH03107642U - - Google Patents
Info
- Publication number
- JPH03107642U JPH03107642U JP10888790U JP10888790U JPH03107642U JP H03107642 U JPH03107642 U JP H03107642U JP 10888790 U JP10888790 U JP 10888790U JP 10888790 U JP10888790 U JP 10888790U JP H03107642 U JPH03107642 U JP H03107642U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- grating structure
- clean room
- pit
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002745 absorbent Effects 0.000 claims description 5
- 239000002250 absorbent Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000428 dust Substances 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 2
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000012717 electrostatic precipitator Substances 0.000 claims 1
- 238000009408 flooring Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000012716 precipitator Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10888790U JPH03107642U (zh) | 1989-12-22 | 1990-10-17 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14839789 | 1989-12-22 | ||
| JP14839389 | 1989-12-22 | ||
| JP10888790U JPH03107642U (zh) | 1989-12-22 | 1990-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03107642U true JPH03107642U (zh) | 1991-11-06 |
Family
ID=31891854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10888790U Pending JPH03107642U (zh) | 1989-12-22 | 1990-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03107642U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009257680A (ja) * | 2008-04-17 | 2009-11-05 | Denso Corp | 作業設備および作業設備における局所クリーンルーム |
-
1990
- 1990-10-17 JP JP10888790U patent/JPH03107642U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009257680A (ja) * | 2008-04-17 | 2009-11-05 | Denso Corp | 作業設備および作業設備における局所クリーンルーム |
| JP4525789B2 (ja) * | 2008-04-17 | 2010-08-18 | 株式会社デンソー | 作業設備および作業設備における局所クリーンルーム |
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