JPH03106738U - - Google Patents
Info
- Publication number
- JPH03106738U JPH03106738U JP1652990U JP1652990U JPH03106738U JP H03106738 U JPH03106738 U JP H03106738U JP 1652990 U JP1652990 U JP 1652990U JP 1652990 U JP1652990 U JP 1652990U JP H03106738 U JPH03106738 U JP H03106738U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- processing
- inert gas
- stopped
- type surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1652990U JPH03106738U (https=) | 1990-02-20 | 1990-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1652990U JPH03106738U (https=) | 1990-02-20 | 1990-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106738U true JPH03106738U (https=) | 1991-11-05 |
Family
ID=31519791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1652990U Pending JPH03106738U (https=) | 1990-02-20 | 1990-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106738U (https=) |
-
1990
- 1990-02-20 JP JP1652990U patent/JPH03106738U/ja active Pending
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