JPH0284757A - Manufacture of lead frame - Google Patents

Manufacture of lead frame

Info

Publication number
JPH0284757A
JPH0284757A JP63237706A JP23770688A JPH0284757A JP H0284757 A JPH0284757 A JP H0284757A JP 63237706 A JP63237706 A JP 63237706A JP 23770688 A JP23770688 A JP 23770688A JP H0284757 A JPH0284757 A JP H0284757A
Authority
JP
Japan
Prior art keywords
lead frame
laser
inner leads
chip size
laser head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63237706A
Other languages
Japanese (ja)
Other versions
JPH0777249B2 (en
Inventor
Hideo Sakamoto
英夫 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63237706A priority Critical patent/JPH0777249B2/en
Publication of JPH0284757A publication Critical patent/JPH0284757A/en
Publication of JPH0777249B2 publication Critical patent/JPH0777249B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To enable the lead frame capable of mounting various types of semiconductor chips to be supplied within a short term of delivery by a method wherein the die pad of a lead frame whereon inner leads are arranged to be radiately expanded is manufactured in the dimension conforming to a chip size using a laser, etc. CONSTITUTION:A die pad of a lead frame 7 whereon inner leads 8 are arranged to be radiately expanded from the center of a resin sealed semiconductor device to the outside is manufactured or formed in the dimension conforming to a chip size using a laser or metallic mold. For example, when the applicable lead frame 7 is initially made, the inner leads 8 are arranged as innerly as possible. Finally, a laser head 4 installed on the lead frame 7 is arbitrarily shifted in the dimension conforming to the chip size by a shifting part 5 using a laser processor composed of a laser oscillator 1, a fiber 3, the laser head 4, the shifting part 5 and a controller 6 so that laser beams may be directed from the laser head 4 to cut off the inner leads 8 for manufacturing the lead frame 7.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は樹脂封止型半導体装置に使用するリードフレー
ムの製造方法に関し、特に、多種類の半導体チップサイ
ズに適用できるリードフレームの製造方法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing a lead frame used in a resin-sealed semiconductor device, and particularly relates to a method for manufacturing a lead frame that can be applied to a wide variety of semiconductor chip sizes. .

〔従来の技術〕[Conventional technology]

従来、この種のリードフレームは第5図の及び第6図の
如く、チップサイズ個々に対応する内部パターンを持っ
ている。
Conventionally, this type of lead frame has an internal pattern corresponding to each chip size, as shown in FIGS. 5 and 6.

この為、リードフレーム製造方法として、1種類のフレ
ームに対し1つの金型で打ち抜くか、又はエツチングに
て製作する方法がある。
For this reason, lead frame manufacturing methods include punching one type of frame using one die or etching.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来のリードフレーム製造方法は、チップサイ
ズ個々に対応する内部パターンを持つ様製造されていた
In the conventional lead frame manufacturing method described above, the lead frame is manufactured to have an internal pattern corresponding to each chip size.

この為、大小各種の半導体チップが載置必要な多種小量
短納期生産品の場合に、従来のリードフレーム製造方法
で作るリードフレームでは、製作納期が長くなり、かつ
コストが高くなる欠点がある。
For this reason, in the case of high-variety, low-volume, quick-delivery products that require semiconductor chips of various sizes to be mounted, lead frames made using conventional lead frame manufacturing methods have the disadvantage of longer production lead times and higher costs. .

〔課題を解決するための手段〕[Means to solve the problem]

本発明のリードフレーム製造方法はリードフレームのイ
ンナーリードを切断させる為のレーザ加工機(レーザ発
振器とレーザ対照部を移動させる移動部とこれらをコン
トロールする制御部)を有している。
The lead frame manufacturing method of the present invention includes a laser processing machine (a moving section for moving a laser oscillator and a laser target section, and a control section for controlling these) for cutting the inner leads of the lead frame.

〔実施例〕〔Example〕

次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例の平面図である。FIG. 1 is a plan view of one embodiment of the present invention.

第2図は第1図の側面図である。第3.第4図は本発明
により製造されたリードフレーム図(例)を表わす。本
実施例によれば、レーザ加工機の構成として、レーザ発
振器1.ファイバー3.レーザヘッド4.移動部5.制
御部6から成っている。
FIG. 2 is a side view of FIG. 1. Third. FIG. 4 represents an example lead frame diagram manufactured according to the present invention. According to this embodiment, the configuration of the laser processing machine includes a laser oscillator 1. Fiber 3. Laser head 4. Moving part 5. It consists of a control section 6.

又、本考案で使用するリードフレーム7は最初に作る際
インナーリード8を可能な限り内側へ入れたリードフレ
ームを使用する。次に、リードフレームの製造方法とし
ては、リードフレームγ上に設置しであるレーザヘッド
4を移動部5によりチップサイズに応じた寸法で任意に
動作させ、レーザヘッド4よりレーザ光2を対照させイ
ンナーリード8を切断し、リードフレームを製造する。
Further, the lead frame 7 used in the present invention is a lead frame in which the inner leads 8 are placed as far inside as possible when first manufactured. Next, as a method for manufacturing the lead frame, the laser head 4 installed on the lead frame γ is moved arbitrarily by the moving unit 5 in a dimension according to the chip size, and the laser beam 2 is focused from the laser head 4. The inner lead 8 is cut to produce a lead frame.

第7図は本発明の他の実施例の正面図であり、第8図は
第7図の側面図である。この実施例によっても第3図、
第4図に示したリードフレームができる。本実施例の構
成はプレス13.金型部17と、リードフレーム移動部
18.リードフレーム保持部19と制御部6から成って
いる。この実施例では、金型部17のパンチ14はイン
ナーリード8を切断する為に必要最低限の大きさ(口1
mm程度)で作られている。リードフレームの製査方法
としては、リードフレーム7をリードフレーム移動部1
8によりチップサイズに応じた寸法で動作させながら、
金型部17を数回に分けて動作させ8インナーリードを
切断し、リードフレームを製造する。
FIG. 7 is a front view of another embodiment of the present invention, and FIG. 8 is a side view of FIG. 7. According to this embodiment, FIG.
The lead frame shown in FIG. 4 is produced. The configuration of this embodiment is press 13. A mold section 17 and a lead frame moving section 18. It consists of a lead frame holding section 19 and a control section 6. In this embodiment, the punch 14 of the mold part 17 has the minimum necessary size (opening 1) to cut the inner lead 8.
(about mm). As a lead frame manufacturing method, the lead frame 7 is moved to the lead frame moving section 1.
8, while operating with dimensions according to the chip size.
The mold section 17 is operated in several steps to cut 8 inner leads to produce a lead frame.

〔発明の効果〕〔Effect of the invention〕

以上説明した様に本発明はインナーリードが樹脂封止半
導体装置の中心から外側に向けて放射状に広がる様配置
されたリードフレームの半導体素子載置部をレーザな用
い、チップサイズに応じた寸法にてインナーリードを加
工し成形することにより、大小各種の半導体チップ載置
可能なリードフレームを短納期又は生産ラインに直接接
続して供給できる効果がある。
As explained above, the present invention uses a laser to cut the semiconductor element mounting portion of the lead frame, which is arranged so that the inner leads radiate outward from the center of the resin-sealed semiconductor device, into dimensions according to the chip size. By processing and molding the inner leads, lead frames capable of mounting semiconductor chips of various sizes can be supplied in a short lead time or by being directly connected to a production line.

【図面の簡単な説明】[Brief explanation of drawings]

成されたリードフレーム図、第5図、第6図は従来のリ
ードフレーム図、第7図は本発明の他の実施例の平1面
図、第8図は第7図の側面図である。 1・・・・・・レーザ発振器、2・・・・・・レーザ光
、3・・・・・・ファイバー 4・・・・・・レーザヘ
ッド、5・・・・・・移動部、6・・・・・・制御部、
7・・・・・・リードフレーム、8・・・・・・インナ
ーリード、9 a r  b r  c +  d・・
・・・・タイバー10・・・・・・アウターリード、1
1・・・・・・樹脂封止部範囲、12・・・・・・アイ
ランド、13・・・・・・プレス部、14・・・・・・
パンチ、15・・・・・・ストリッパープレート、16
・・・・・・ダイ、17・・・・・・金型部、18・・
・・・・リードフレーム移動部、19・・・・・・リー
ドフレーム保持部。 め ぐ ミ 〈 是 代理人 弁理士  内 原   晋 −、、”   ”   ”  ”  ”   ”   
JINNNCY>  も 梢Nト 笥炉 ζ≧ \ \ \
Figures 5 and 6 are diagrams of the conventional lead frame, Figure 7 is a plan view of another embodiment of the present invention, and Figure 8 is a side view of Figure 7. . DESCRIPTION OF SYMBOLS 1... Laser oscillator, 2... Laser light, 3... Fiber 4... Laser head, 5... Moving part, 6... ...control section,
7... Lead frame, 8... Inner lead, 9 a r b r c + d...
... Tie bar 10 ... Outer lead, 1
1...Resin sealing part range, 12...Island, 13...Pressed part, 14...
Punch, 15... Stripper plate, 16
...Die, 17...Mold part, 18...
...Lead frame moving section, 19...Lead frame holding section. Megumi〈Representative Patent Attorney Susumu Uchihara...” ” ” ” ” ”
JINNNCY> too

Claims (1)

【特許請求の範囲】[Claims] インナーリードが樹脂封止半導体装置の中心から外側に
向けて放射状に広がる様配置されたリードフレームの半
導体載置部をレーザ又は金型を用い、チップサイズに応
じて寸法にてインナーリードを加工し、成形することを
特徴とするリードフレームの製造方法。
The semiconductor mounting part of the lead frame, which is arranged so that the inner leads spread radially outward from the center of the resin-sealed semiconductor device, is processed using a laser or a mold to the dimensions according to the chip size. , a method for manufacturing a lead frame characterized by molding.
JP63237706A 1988-09-21 1988-09-21 Lead frame manufacturing method Expired - Lifetime JPH0777249B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63237706A JPH0777249B2 (en) 1988-09-21 1988-09-21 Lead frame manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63237706A JPH0777249B2 (en) 1988-09-21 1988-09-21 Lead frame manufacturing method

Publications (2)

Publication Number Publication Date
JPH0284757A true JPH0284757A (en) 1990-03-26
JPH0777249B2 JPH0777249B2 (en) 1995-08-16

Family

ID=17019300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63237706A Expired - Lifetime JPH0777249B2 (en) 1988-09-21 1988-09-21 Lead frame manufacturing method

Country Status (1)

Country Link
JP (1) JPH0777249B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02247089A (en) * 1988-10-10 1990-10-02 Lsi Logic Prod Gmbh Lead frame
US6084204A (en) * 1997-04-21 2000-07-04 Samsung Aerospace Industries, Ltd. Leadframe manufacturing apparatus using laser beams

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5294073A (en) * 1976-02-04 1977-08-08 Hitachi Ltd Leading-in frame and process for preparing it
JPS61216354A (en) * 1985-03-20 1986-09-26 Shinko Electric Ind Co Ltd Manufacture of lead frame
JPS62204555A (en) * 1986-03-04 1987-09-09 Nec Corp Lead frame

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5294073A (en) * 1976-02-04 1977-08-08 Hitachi Ltd Leading-in frame and process for preparing it
JPS61216354A (en) * 1985-03-20 1986-09-26 Shinko Electric Ind Co Ltd Manufacture of lead frame
JPS62204555A (en) * 1986-03-04 1987-09-09 Nec Corp Lead frame

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02247089A (en) * 1988-10-10 1990-10-02 Lsi Logic Prod Gmbh Lead frame
US6084204A (en) * 1997-04-21 2000-07-04 Samsung Aerospace Industries, Ltd. Leadframe manufacturing apparatus using laser beams

Also Published As

Publication number Publication date
JPH0777249B2 (en) 1995-08-16

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