JPH02817B2 - - Google Patents

Info

Publication number
JPH02817B2
JPH02817B2 JP60147394A JP14739485A JPH02817B2 JP H02817 B2 JPH02817 B2 JP H02817B2 JP 60147394 A JP60147394 A JP 60147394A JP 14739485 A JP14739485 A JP 14739485A JP H02817 B2 JPH02817 B2 JP H02817B2
Authority
JP
Japan
Prior art keywords
working distance
sample
objective lens
electrode
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60147394A
Other languages
English (en)
Japanese (ja)
Other versions
JPS628438A (ja
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60147394A priority Critical patent/JPS628438A/ja
Publication of JPS628438A publication Critical patent/JPS628438A/ja
Publication of JPH02817B2 publication Critical patent/JPH02817B2/ja
Granted legal-status Critical Current

Links

JP60147394A 1985-07-04 1985-07-04 走査電子顕微鏡 Granted JPS628438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60147394A JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60147394A JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS628438A JPS628438A (ja) 1987-01-16
JPH02817B2 true JPH02817B2 (OSRAM) 1990-01-09

Family

ID=15429277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60147394A Granted JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS628438A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6499685B2 (ja) 2017-02-03 2019-04-10 本田技研工業株式会社 繊維強化樹脂成形品、繊維強化樹脂成形品の製造方法及びその製造装置

Also Published As

Publication number Publication date
JPS628438A (ja) 1987-01-16

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