JPH0279554U - - Google Patents
Info
- Publication number
- JPH0279554U JPH0279554U JP15803488U JP15803488U JPH0279554U JP H0279554 U JPH0279554 U JP H0279554U JP 15803488 U JP15803488 U JP 15803488U JP 15803488 U JP15803488 U JP 15803488U JP H0279554 U JPH0279554 U JP H0279554U
- Authority
- JP
- Japan
- Prior art keywords
- quadrupole mass
- attached
- flange
- mass spectrometer
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005173 quadrupole mass spectroscopy Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案装置の１実施例の概略図であり
、第２図は従来の装置の構成図を示す。 １……成長室、２……差動排気室、３……四重
極質量分析器、４……コリメータ、５，６……排
気口、７……分子線源、８……分子線、９，１０
，１１……真空用シール材。
、第２図は従来の装置の構成図を示す。 １……成長室、２……差動排気室、３……四重
極質量分析器、４……コリメータ、５，６……排
気口、７……分子線源、８……分子線、９，１０
，１１……真空用シール材。
Claims (1)
- 運動方向がある定まつた立体角の中にある分子
だけを抽出するためのコリメータが一方の端部開
口部に着脱自在に取付けられ、他方の端部に気相
薄膜成長室に取付けるための真空用フランジを備
え、フランジの中央には四重極質量分析器を挿入
するための開口と内部を高真空に保つための差動
排気口が設けられていることを特徴とする四重極
質量分析器用真空容器。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15803488U JPH0542614Y2 (ja) | 1988-12-06 | 1988-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15803488U JPH0542614Y2 (ja) | 1988-12-06 | 1988-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279554U true JPH0279554U (ja) | 1990-06-19 |
| JPH0542614Y2 JPH0542614Y2 (ja) | 1993-10-27 |
Family
ID=31438001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15803488U Expired - Lifetime JPH0542614Y2 (ja) | 1988-12-06 | 1988-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542614Y2 (ja) |
-
1988
- 1988-12-06 JP JP15803488U patent/JPH0542614Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542614Y2 (ja) | 1993-10-27 |