JPS6279873U - - Google Patents
Info
- Publication number
- JPS6279873U JPS6279873U JP17136485U JP17136485U JPS6279873U JP S6279873 U JPS6279873 U JP S6279873U JP 17136485 U JP17136485 U JP 17136485U JP 17136485 U JP17136485 U JP 17136485U JP S6279873 U JPS6279873 U JP S6279873U
- Authority
- JP
- Japan
- Prior art keywords
- rotating plate
- large rotating
- plate
- small
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
図はこの考案の系統図である。
１……真空室、４……蓋、６……電極、８……
回転小皿、１１……回転大皿、１３……固定皿。
回転小皿、１１……回転大皿、１３……固定皿。
Claims (1)
- 中央部に開口部を持つ回転大皿１１と、回転大
皿１１の下部に設けられた回転小皿８と、回転大
皿１１と回転小皿８との間に設けられた固定皿１
２を構成要素とする薄膜成長装置の構造。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17136485U JPS6279873U (ja) | 1985-11-07 | 1985-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17136485U JPS6279873U (ja) | 1985-11-07 | 1985-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279873U true JPS6279873U (ja) | 1987-05-21 |
Family
ID=31106917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17136485U Pending JPS6279873U (ja) | 1985-11-07 | 1985-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279873U (ja) |
-
1985
- 1985-11-07 JP JP17136485U patent/JPS6279873U/ja active Pending