JPH0265333U - - Google Patents
Info
- Publication number
- JPH0265333U JPH0265333U JP14489288U JP14489288U JPH0265333U JP H0265333 U JPH0265333 U JP H0265333U JP 14489288 U JP14489288 U JP 14489288U JP 14489288 U JP14489288 U JP 14489288U JP H0265333 U JPH0265333 U JP H0265333U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist coating
- coating apparatus
- chuck
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14489288U JPH0632673Y2 (ja) | 1988-11-08 | 1988-11-08 | レジスト塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14489288U JPH0632673Y2 (ja) | 1988-11-08 | 1988-11-08 | レジスト塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0265333U true JPH0265333U (me) | 1990-05-16 |
| JPH0632673Y2 JPH0632673Y2 (ja) | 1994-08-24 |
Family
ID=31413000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14489288U Expired - Lifetime JPH0632673Y2 (ja) | 1988-11-08 | 1988-11-08 | レジスト塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632673Y2 (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05283511A (ja) * | 1992-03-31 | 1993-10-29 | Nippon Telegr & Teleph Corp <Ntt> | 真空吸着装置 |
-
1988
- 1988-11-08 JP JP14489288U patent/JPH0632673Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05283511A (ja) * | 1992-03-31 | 1993-10-29 | Nippon Telegr & Teleph Corp <Ntt> | 真空吸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632673Y2 (ja) | 1994-08-24 |
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