JPH0161975U - - Google Patents
Info
- Publication number
- JPH0161975U JPH0161975U JP15777587U JP15777587U JPH0161975U JP H0161975 U JPH0161975 U JP H0161975U JP 15777587 U JP15777587 U JP 15777587U JP 15777587 U JP15777587 U JP 15777587U JP H0161975 U JPH0161975 U JP H0161975U
- Authority
- JP
- Japan
- Prior art keywords
- control port
- coated
- rotating table
- coating device
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15777587U JPH0161975U (me) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15777587U JPH0161975U (me) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161975U true JPH0161975U (me) | 1989-04-20 |
Family
ID=31437511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15777587U Pending JPH0161975U (me) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161975U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012151238A (ja) * | 2011-01-18 | 2012-08-09 | Tokyo Electron Ltd | 液処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61291072A (ja) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | スピンコ−テイング方法 |
| JPS6161070B2 (me) * | 1976-12-02 | 1986-12-24 | Bofors Ab |
-
1987
- 1987-10-15 JP JP15777587U patent/JPH0161975U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161070B2 (me) * | 1976-12-02 | 1986-12-24 | Bofors Ab | |
| JPS61291072A (ja) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | スピンコ−テイング方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012151238A (ja) * | 2011-01-18 | 2012-08-09 | Tokyo Electron Ltd | 液処理装置 |
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