JPH0265341U - - Google Patents
Info
- Publication number
- JPH0265341U JPH0265341U JP14349388U JP14349388U JPH0265341U JP H0265341 U JPH0265341 U JP H0265341U JP 14349388 U JP14349388 U JP 14349388U JP 14349388 U JP14349388 U JP 14349388U JP H0265341 U JPH0265341 U JP H0265341U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing stage
- rotation processing
- transfer arm
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988143493U JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988143493U JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0265341U true JPH0265341U (me) | 1990-05-16 |
| JP2532708Y2 JP2532708Y2 (ja) | 1997-04-16 |
Family
ID=31410371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988143493U Expired - Lifetime JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2532708Y2 (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199245A (ja) * | 2009-02-24 | 2010-09-09 | Yaskawa Electric Corp | プリアライナ装置を備えたウェハ搬送システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121930U (me) * | 1988-02-12 | 1989-08-18 |
-
1988
- 1988-11-04 JP JP1988143493U patent/JP2532708Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121930U (me) * | 1988-02-12 | 1989-08-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199245A (ja) * | 2009-02-24 | 2010-09-09 | Yaskawa Electric Corp | プリアライナ装置を備えたウェハ搬送システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2532708Y2 (ja) | 1997-04-16 |